...
首页> 外文期刊>Journal of Micromechanics and Microengineering >Research on reference vibration for a two-axis piezoelectric micro-machined gyroscope
【24h】

Research on reference vibration for a two-axis piezoelectric micro-machined gyroscope

机译:两轴压电微机械陀螺仪参考振动的研究

获取原文
获取原文并翻译 | 示例
           

摘要

This paper presents a new method for vibratory gyroscopes. A novel special vibration is presented, and when it is taken as a reference vibration, the device can sense two-axis angular velocity. It has a simple structure without suspending structures and high resistance to shock. In addition, an effective driving method is proposed which realizes a desired reference vibration for sensing two-axis angular velocities. The operation principle and coupling effects of our device are analyzed. For improving the sensitivity of the device, the optimal structure (4 mm × 4 mm × 3 mm) and the optimal reference vibration (with a driving frequency of 260.8 kHz and an effective velocity of 20 589.241 μm s~(-1)) are found. We obtain the methods to monitor the desired reference vibration, which are crucial for compensating errors and ensuring the high sensitivity and accuracy of the device. Furthermore, the driving and detecting circuit is designed and a printed circuit board is fabricated. The fabrication process of our device and its output results are given. By a comparison of the measurement and simulation results, the optimal reference vibration of the fabricated device is obtained.
机译:本文提出了一种振动陀螺仪的新方法。提出了一种新颖的特殊振动,当将其作为参考振动时,该设备可以感应到两轴角速度。结构简单,无悬架结构,抗冲击能力强。此外,提出了一种有效的驱动方法,该方法实现了用于感测两轴角速度的期望参考振动。分析了设备的工作原理和耦合效果。为了提高设备的灵敏度,最佳结构(4 mm×4 mm×3 mm)和最佳参考振动(驱动频率为260.8 kHz,有效速度为20 589.241μms〜(-1))是找到了。我们获得了监视所需参考振动的方法,这对于补偿误差和确保设备的高灵敏度和准确性至关重要。此外,设计驱动和检测电路并制造印刷电路板。给出了我们设备的制造过程及其输出结果。通过比较测量结果和仿真结果,可以获得所制造设备的最佳参考振动。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号