In this paper, we present a micro flow sensor from a polymer based on the thermal anemometric principle. A sensor with outer dimensions of 5.5×6×1.2 mm~3 and a small fluidic channel with a cross-section of 240μm × 400μm may be operated with both gases (up to 200 ml min~(-1)) and liquids (for water up to 200μl min~(-1)). Due to its small heat capacity, the sensor is also suitable for dynamical measurements of liquid flows, e.g. flow pulsations up to several 100 Hz even within high-pressure hydraulic systems.
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机译：在本文中，我们基于热风速原理介绍了一种由聚合物制成的微流量传感器。外部尺寸为5.5×6×1.2 mm〜3且横截面为240μm×400μm的小流体通道的传感器可以同时使用气体（最小200 ml min〜（-1））和液体（对于水至200μl分钟〜（-1））。由于其热容量小，该传感器还适用于液体流量的动态测量，例如：即使在高压液压系统中，流量脉动也高达100 Hz。
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