Fabrication and electrical integration of robust carbon nanotube micropillars by self-directed elastocapillary densification

Michael F. L. De Voider; Sei Jin Park; Sameh H. Tawfick; Daniel O. Vidaud; A. John Hart

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Fabrication and electrical integration of robust carbon nanotube micropillars by self-directed elastocapillary densification

机译：自我引导的弹性毛细管致密化制备坚固的碳纳米管微柱并对其进行电集成

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Vertically aligned carbon nanotube (CNT) 'forest' microstructures fabricated by chemical vapor deposition (CVD) using patterned catalyst films typically have a low CNT density per unit area. As a result, CNT forests have poor bulk properties and are too fragile for integration with microfabrication processing. We introduce a new self-directed capillary densification method where a liquid is controllably condensed onto and evaporated from the CNT forests. Compared to prior approaches, where the substrate with CNTs is immersed in a liquid, our condensation approach gives significantly more uniform structures and enables precise control of the CNT packing density. We present a set of design rules and parametric studies of CNT micropillar densification by self-directed capillary action, and show that self-directed capillary densification enhances Young's modulus and electrical conductivity of CNT micropillars by more than three orders of magnitude. Owing to the outstanding properties of CNTs, this scalable process will be useful for the integration of CNTs as a functional material in microfabricated devices for mechanical, electrical, thermal and biomedical applications.

机译：使用图案化的催化剂膜通过化学气相沉积（CVD）制成的垂直排列的碳纳米管（CNT）'森林'微结构通常每单位面积的CNT密度较低。结果，碳纳米管森林的整体性质较差，并且太脆弱，无法与微细加工工艺整合。我们介绍了一种新的自定向毛细管致密化方法，其中可控地将液体冷凝到CNT林中并从中蒸发。与以前的方法相比，在先有方法中，将带有CNT的基材浸入液体中，我们的缩合方法可提供更为均匀的结构，并可以精确控制CNT的堆积密度。我们提出了一组通过自定向毛细管作用对CNT微柱致密化的设计规则和参数研究，并显示了自定向毛细管致密化将CNT微柱的杨氏模量和电导率提高了三个数量级以上。由于碳纳米管的卓越性能，这种可扩展的工艺将有助于将碳纳米管作为功能材料集成到机械，电气，热学和生物医学应用的微型设备中。

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《Journal of Micromechanics and Microengineering》 |2011年第4期|共12页
作者
Michael F. L. De Voider; Sei Jin Park; Sameh H. Tawfick; Daniel O. Vidaud; A. John Hart;
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机译：自我引导的弹性毛细管致密化制备坚固的碳纳米管微柱并对其进行电集成
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Fabrication and electrical integration of robust carbon nanotube micropillars by self-directed elastocapillary densification

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