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首页> 外文期刊>Journal of Micromechanics and Microengineering >Nonlinear sensitivity enhancement of resonant microsensors and its application to low power magnetic sensing
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Nonlinear sensitivity enhancement of resonant microsensors and its application to low power magnetic sensing

机译：共振微传感器的非线性灵敏度增强及其在低功率磁传感中的应用

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Nonlinearities in resonating structures can be used to increase the sensitivity of sensors based on these structures. An example system, a torsional resonant magnetic sensor, is analyzed to illustrate the effect. The system is composed of a disk-type silicon resonator combined with a permanent magnet supported by multiple micromachined silicon beams, excitation and sensing coils, and a magnetic feedback loop. The effects of nonlinearity on sensitivity have been characterized as a function of beam width and the number of beams using analytical models as well as numerical analysis. By increasing the number of beams while reducing the beam width (and thereby maintaining constant nominal linear resonant frequency), large nonlinearity has been obtained, resulting in an increased change in operating resonant frequency per unit applied magnetic field. The interaction between an external magnetic field surrounding the sensor and the permanent magnet generates a rotating torque on the silicon resonator disk, changing the effective stiffness of the beams and therefore the resonant frequency of the sensor. By monitoring shifts in the resonant frequency while changing the orientation of the sensor with respect to the external magnetic field, the direction of the external magnetic field can be determined. Self-resonance-based electromagnetic excitation of the mechanical resonator enables it to operate with very low power consumption and low excitation voltage. A total system power consumption of less than 140 μW and a resonator actuation voltage of 1.4 mVrms from a ±1.2 V power supply have been demonstrated with a sensitivity of 0.28 Hz/rotational degree to the Earth's magnetic field.
机译：谐振结构中的非线性可用于增加基于这些结构的传感器的灵敏度。分析了一个示例系统，即扭转共振磁传感器，以说明这种影响。该系统由盘形硅谐振器和永磁体组成，永磁体由多个微加工的硅束，激励和感测线圈以及磁反馈回路支撑。使用分析模型以及数值分析，已经将非线性对灵敏度的影响表征为光束宽度和光束数量的函数。通过增加束的数量同时减小束的宽度（从而保持恒定的标称线性谐振频率），获得了较大的非线性度，从而导致每单位施加磁场的工作谐振频率的变化增加。传感器周围的外部磁场与永磁体之间的相互作用在硅谐振器盘上产生旋转扭矩，从而改变了梁的有效刚度，从而改变了传感器的谐振频率。通过在改变传感器相对于外部磁场的方向的同时监视共振频率的变化，可以确定外部磁场的方向。机械谐振器的基于自谐振的电磁激励使其能够以非常低的功耗和低激励电压工作。已经证明，系统的总功耗小于140μW，并且来自±1.2 V电源的谐振器激励电压为1.4 mVrms，对地球磁场的灵敏度为0.28 Hz /旋转度。

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