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首页> 外文期刊>Journal of Micromechanics and Microengineering >Roll-to-roll fabrication of a low-reflectance transparent conducting oxide film with subwavelength structures
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Roll-to-roll fabrication of a low-reflectance transparent conducting oxide film with subwavelength structures

机译：卷到卷的具有亚波长结构的低反射率透明导电氧化物膜的制造

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摘要

The transparent conducting oxide (TCO) film is a significant component in flat panel display, e-paper and touch panel. The tin-doped indium oxide (ITO) material is one of the most popular TCOs. However, ITO has high refractive index, so the phenomenon of high-reflectance limits the wide use of ITO. In this study, the structure and mass production process of new low-reflectance TCO film is verified. Laser interference lithography and the roll-to-roll UV embossing process are used to fabricate subwavelength structures on PET film; then ITO was deposited on structures by roll-to-roll sputtering. When the dimension of structures reaches 300 nm pitch, the optical reflectance and electrical performance of film are reduced to 8.1% at wavelength 550 nm and its transmittance rate is 84.3% at the same wavelength, and the sheet resistance of this film is 50.44 Ω/□. This result indicates that the new TCO proposed in this study is suitable for touch panel and other display applications.
机译：透明导电氧化物（TCO）膜是平板显示器，电子纸和触摸屏的重要组成部分。掺锡氧化铟（ITO）材料是最受欢迎的TCO之一。然而，ITO具有高折射率，因此高反射现象限制了ITO的广泛使用。本研究验证了新型低反射TCO薄膜的结构和量产过程。激光干涉光刻技术和卷对卷紫外线压印工艺用于在PET膜上制造亚波长结构。然后通过卷对卷溅射将ITO沉积在结构上。当结构尺寸达到300 nm间距时，在550 nm波长下薄膜的光学反射率和电性能降低到8.1％，在相同波长下其透射率为84.3％，该薄膜的薄层电阻为50.44Ω/ □。该结果表明，本研究中提出的新的TCO适用于触摸面板和其他显示应用。

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