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首页> 外文期刊>Journal of Micromechanics and Microengineering >Precision patterning of conductive polymer nanocomposite using a laser-ablated thin film
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Precision patterning of conductive polymer nanocomposite using a laser-ablated thin film

机译：使用激光烧蚀薄膜对导电聚合物纳米复合材料进行精确图案化

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We introduce a simple, reliable and low-cost microfabrication technique utilizing laser ablation of a thin polymer film to pattern polymer nanocomposite at a high resolution. A conductive composite of poly(dimethylsiloxane) (PDMS) and carbon nanotubes (CNTs) was selected due to their wide use in microelectromechanical systems (MEMS) and unique properties including flexibility and piezoresistivity. To pattern nanocomposite, an excimer laser ablated through a thin polyethylene terephthalate film creating mold patterns. PDMS-CNTs nanocomposite was then filled into the mold with excessive amount removed by a smooth-edged tool. Bulk PDMS was poured atop and cured. After debonding devices with relief patterns of polymer nanocomposite could be readily realized. Fabrication conditions were optimized which led to reliable patterning of various microstructures. Detailed surface profiling revealed excellent pattern authenticity and uniformity. Minimal feature size of patterns reached below 20 μm which indicated a significant improvement from prior reports. Moreover, the presented technique required only a software design to rapidly generate new patterns, thereby eliminating costly hardware such as lithography mask, stamp and clean room. Fabrication time and cost could be consequently reduced - ideal for lab prototyping purposes. Sensor examples are discussed to demonstrate versatile applications of polymer nanocomposite in MEMS.
机译：我们介绍了一种简单，可靠且低成本的微细加工技术，该技术利用激光烧蚀薄聚合物膜以高分辨率图案化聚合物纳米复合材料。选择聚（二甲基硅氧烷）（PDMS）和碳纳米管（CNT）的导电复合材料是因为它们在微机电系统（MEMS）中的广泛使用以及包括柔韧性和压阻性在内的独特性能。为了图案化纳米复合材料，准分子激光烧蚀穿过聚对苯二甲酸乙二酯薄膜，形成模具图案。然后将PDMS-CNTs纳米复合材料填充到模具中，并用磨边工具将其去除过多。将大量的PDMS倒在上面并固化。在具有聚合物纳米复合材料的浮雕图案的剥离装置之后，可以容易地实现。优化了制造条件，从而导致各种微结构的可靠图案化。详细的表面轮廓显示出出色的图案真实性和均匀性。图案的最小特征尺寸达到20μm以下，表明与以前的报道相比有显着改善。此外，提出的技术仅需要软件设计即可快速生成新图案，从而消除了昂贵的硬件，例如光刻掩模，印模和洁净室。因此可以减少制造时间和成本-非常适合实验室原型设计。讨论了传感器示例，以演示聚合物纳米复合材料在MEMS中的广泛应用。

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