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首页> 外文期刊>Journal of Micromechanics and Microengineering >A novel shock and heat tolerant gyrosensor utilizing a one-port surface acoustic wave reflective delay line
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A novel shock and heat tolerant gyrosensor utilizing a one-port surface acoustic wave reflective delay line

机译：利用单端口声表面波反射延迟线的新型耐震耐热陀螺传感器

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A surface acoustic wave (SAW)-based gyroscope with an 80 MHz central frequency was fabricated on a 128° YX LiNbO_3 piezoelectric substrate. The fabricated gyroscope is composed of a SAW resonator, metallic dots and a SAW reflective delay line. The SAW resonator, which is activated by a voltage-controlled oscillator, generates a stable standing wave with a large amplitude at an 80 MHz resonant frequency, and the metallic dots induce a Coriolis force and generate a secondary SAW in the direction orthogonal to the propagating standing wave. The SAW reflective delay line is employed to measure the Coriolis effect by analyzing the deviations in the resonant frequency of the SAW reflective delay line. A combined finite element method/boundary element method was utilized to extract the optimal device parameters prior to fabrication. The device was fabricated according to the modeling results and then measured on a rate table. When the device was subjected to an angular rotation, a secondary SAW from the vibrating metallic dots was generated owing to the Coriolis force, resulting in a perturbation of the propagating SAW in the SAW reflective delay line. Depending on the angular velocity, the reflection peak of SAW reflective delay line was changed linearly, and this change was measured by the network analyzer. The measured results matched the modeling results well. The obtained sensitivity was approximately 1.23 deg/(deg/s) in an angular rate range of 0-2000 deg s~(-1). Good thermal and shock stabilities were observed during the evaluation process proving the shock and heat robustness of the fabricated SAW gyroscope.
机译：在128°YX LiNbO_3压电基板上制造了中心频率为80 MHz的基于表面声波（SAW）的陀螺仪。所制造的陀螺仪由SAW谐振器，金属点和SAW反射延迟线组成。由电压控制振荡器激活的SAW谐振器在80 MHz谐振频率下产生一个稳定的大振幅驻波，金属点产生科里奥利力并在与传播方向正交的方向上产生次级SAW驻波。 SAW反射延迟线用于通过分析SAW反射延迟线的谐振频率的偏差来测量科里奥利效应。在制造之前，结合了有限元法/边界元法来提取最佳器件参数。根据建模结果制造该设备，然后在速率表上对其进行测量。当该装置进行角旋转时，由于科里奥利力而从振动的金属点产生了次级SAW，导致传播的SAW在SAW反射延迟线上受到干扰。根据角速度，SAW反射延迟线的反射峰线性变化，并通过网络分析仪测量该变化。测量结果与建模结果非常吻合。在0-2000 deg s〜（-1）的角速率范围内，获得的灵敏度约为1.23 deg /（deg / s）。在评估过程中观察到了良好的热稳定性和冲击稳定性，证明了所制造的SAW陀螺仪的抗冲击性和耐热性。

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