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首页> 外文期刊>Journal of Micromechanics and Microengineering >Theoretical simulation and experimental confirmation of duty cycle effect on stroboscopic white light interferometry for M(O)EMS dynamic characterization
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Theoretical simulation and experimental confirmation of duty cycle effect on stroboscopic white light interferometry for M(O)EMS dynamic characterization

机译：M（O）EMS动态表征对频闪白光干涉仪占空比影响的理论模拟和实验确认

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摘要

Stroboscopic white light interferometry (SWLI) has been known as a useful measurement technique for vibrating samples such as micro-electro-mechanical systems (MEMS) or micro-opto-electro-mechanical systems (M(O)EMS) because it enables dynamic mode reconstruction and characterization of the tested system. An approximate model simulation without any experimental confirmation previously indicated that the duty cycle of the light could reduce the accuracy of the measurement. To provide a comprehensive insight into this important phenomenon, the study investigated theoretically and experimentally the effect of duty cycle of the light. An atomic force microscopy cantilever beam vibrating at its second resonant frequency was measured and the experimental measurements were analyzed and compared with the simulated results. In general, a reasonable correspondence between the mathematical model and the experimental measurements has been observed when the duty cycle is less than 15% and the average deviation is kept within 15.4% of the vibration amplitude. However, it is verified that the SWLI using white light LED has its physical detection limits when the cycle time of the strobed light or the light exposure time of the imaging device is more than 20%, in which the maximum measured error can significantly exceed 38.4% of the vibration amplitude.
机译：频闪式白光干涉测量法（SWLI）是一种用于振动样品的有用测量技术，例如微机电系统（MEMS）或微光电系统（M（O）EMS），因为它可以实现动态模式重建和表征测试系统。之前没有任何实验确认的近似模型仿真表明，光的占空比可能会降低测量的准确性。为了提供对该重要现象的全面了解，该研究在理论和实验上研究了光的占空比的影响。测量了在第二共振频率下振动的原子力显微镜悬臂梁，并分析了实验测量结果并与模拟结果进行了比较。通常，当占空比小于15％且平均偏差保持在振动幅度的15.4％以内时，可以观察到数学模型与实验测量值之间的合理对应关系。但是，已证实，当频闪灯的周期时间或成像设备的曝光时间大于20％时，使用白光LED的SWLI会有其物理检测极限，其中最大测量误差可以明显超过38.4振动幅度的％。

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