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首页> 外文期刊>Journal of Micromechanics and Microengineering >Actuated elastomers with rigid vertical electrodes
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Actuated elastomers with rigid vertical electrodes

机译：带刚性垂直电极的致动弹性体

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This paper presents a novel design of actuated elastomers using rigid, vertical standing electrodes. The electrodes of high rigidity are designed to have small width, small gaps and large depth in order to produce large electrostatic forces at a moderate voltage, as well as to reduce the constraining effect on the soft elastomers. This novel design embodies lateral stacking to accumulate small strain into an adequate displacement for micro-actuation. Analytical and numerical analyses are performed to evaluate the force-displacement characteristics of the elastomer actuators. It is shown that actuation of the novel design is not limited by the electrostatic pull-in instability, and it is capable of travelling a large range at a high electric field. In addition, feasibility of fabrication processes is studied. It is shown that lateral stacking can readily be realized by filling liquid elastomers into deep, narrow and vertical trenches. A theoretical benchmark comparison with a conventional air-gap electrostatic comb drive indicates that the new elastomer actuator promises great flexibility, large attraction force and robustness against shock and dust blockage.
机译：本文介绍了一种使用刚性垂直立式电极的新型驱动弹性体设计。高刚性的电极被设计成具有较小的宽度，较小的间隙和较大的深度，以便在中等电压下产生较大的静电力，并减小对软弹性体的约束作用。这种新颖的设计体现了横向堆叠，以将小应变累积到足够的位移以进行微驱动。进行分析和数值分析以评估弹性体致动器的力-位移特性。结果表明，新颖设计的致动不受静电吸合不稳定性的限制，并且能够在高电场下大范围传播。另外，研究了制造工艺的可行性。已经表明，通过将液态弹性体填充到深，窄和垂直的沟槽中可以容易地实现横向堆叠。理论上与常规气隙静电梳齿驱动器的基准比较表明，新的弹性体致动器具有很大的柔韧性，较大的吸引力以及抗冲击和防尘的坚固性。

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