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首页> 外文期刊>Journal of Physics, D. Applied Physics: A Europhysics Journal >Mass removal modes in the laser ablation of silicon by a Q-switched diode-pumped solid-state laser (DPSSL)
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Mass removal modes in the laser ablation of silicon by a Q-switched diode-pumped solid-state laser (DPSSL)

机译：Q开关二极管泵浦固态激光器（DPSSL）在激光烧蚀硅中的质量去除模式

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摘要

A fundamental study on the Q-switched diode-pumped solid-state laser interaction with silicon was performed both experimentally and numerically. Single pulse drilling experiments were conducted on N-type silicon wafers by varying the laser intensity from 10(8)-10(9)W cm(-2) to investigate how the mass removal mechanism changes depending on the laser intensity. Hole width and depth were measured and surface morphology was studied using scanning electron microscopy. For the numerical model study, Ki et al's self-consistent continuous-wave laser drilling model (2001 J. Phys. D: Appl. Phys. 34 364-72) was modified to treat the solidification phenomenon between successive laser pulses. The model has the capabilities of simulating major interaction physics, such as melt flow, heat transfer, evaporation, homogeneous boiling, multiple reflections and surface evolution. This study presents some interesting results on how the mass removal mode changes as the laser intensity increases.
机译：在实验和数值上都进行了Q开关二极管泵浦固态激光器与硅相互作用的基础研究。通过将激光强度从10（8）-10（9）W cm（-2）更改为N型硅晶片，进行了单脉冲钻孔实验，以研究质量去除机理如何随激光强度而变化。测量孔的宽度和深度，并使用扫描电子显微镜研究表面形态。对于数值模型研究，修改了Ki等人的自洽连续波激光钻孔模型（2001 J. Phys。D：Appl。Phys。34 364-72），以处理连续激光脉冲之间的凝固现象。该模型具有模拟主要相互作用物理的能力，例如熔体流动，传热，蒸发，均质沸腾，多次反射和表面演化。这项研究提出了一些有趣的结果，说明随着激光强度的增加，质量去除模式将如何变化。

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