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首页> 外文期刊>Journal of Physics, D. Applied Physics: A Europhysics Journal >Temperature-dependent optical properties of silicon carbide for wireless temperature sensors
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Temperature-dependent optical properties of silicon carbide for wireless temperature sensors

机译：无线温度传感器用碳化硅的随温度变化的光学特性

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摘要

The temperature-dependent optical properties of materials, such as refractive index and reflectivity, can be used for remote sensing of temperatures using a laser beam. Wireless sensing mechanism eliminates the need for external electrical contacts to the sensor, typically required in electrical property-based sensors. Such contacts tend to melt at elevated temperatures. This paper investigates the optical response of silicon carbide to temperature changes, indicating the potential for realizing silicon carbide-based high temperature wireless sensors by using a helium-neon laser of wavelength 632.8 nm. The laser power reflected by single crystal 6H-silicon carbide substrates has been measured at different temperatures up to 750 degrees C. The reflected powers exhibited oscillatory patterns caused by multiple beam interference for which the substrate itself acts as a Fabry-Perot etalon. These results were used to calculate the refractive index, reflectivity and thermo-optic coefficients of silicon carbide as a function of temperature. Two samples with different dopant profiles were investigated to examine the effects of dopants on the optical response of silicon carbide substrates. With proper modification of the microstructure in the substrate, the temperature dependence of reflectivity can be used directly to measure temperature remotely.
机译：材料的取决于温度的光学特性（例如折射率和反射率）可用于使用激光束进行温度遥感。无线感测机制消除了对外部电触点的需求，这在基于电气特性的传感器中通常是必需的。这样的接触倾向于在高温下熔化。本文研究了碳化硅对温度变化的光学响应，表明了通过使用波长为632.8 nm的氦氖激光器来实现基于碳化硅的高温无线传感器的潜力。已经在高达750摄氏度的不同温度下测量了单晶6H-碳化硅衬底反射的激光功率。反射的功率表现出由多光束干涉引起的振荡模式，为此衬底本身充当法布里-珀罗标准具。这些结果用于计算碳化硅的折射率，反射率和热光系数随温度的变化。研究了具有不同掺杂剂分布的两个样品，以研究掺杂剂对碳化硅衬底光学响应的​​影响。通过适当修改基板中的微结构，可以将反射率的温度依赖性直接用于远程测量温度。

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