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首页> 外文期刊>Journal of Physics, D. Applied Physics: A Europhysics Journal >Anatase phase stability and doping concentration dependent refractivity in codoped transparent conducting TiO2 films
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Anatase phase stability and doping concentration dependent refractivity in codoped transparent conducting TiO2 films

机译:共掺杂透明导电TiO2薄膜的锐钛矿相稳定性和掺杂浓度依赖性折射率

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摘要

Nb0.06Sn x Ti0.94-x O-2 ( x <= 0.3) thin films were grown by a pulsed-laser deposition method with varying Sn concentration. Through a combinatorial technique, we find that Sn concentration can reach a maximum of about x = 0.3 while maintaining the stable anatase phase and epitaxy. A doping concentration dependence of the refractivity is revealed, in which refractivity reduction at a wavelength of. = 500 nm is estimated to be 12.4% for Nb0.06Sn0.3Ti0.64O2 thin film. Sn doping induced band-gap blue shift can be contributed to the mixing of extended Sn 5s orbitals with the conduction band of TiO2. Low resistivity on the order of 10(-4) Omega cm at room temperature and high internal transmittance of more than 95% in the visible light region are exhibited for Nb0.06Sn x Ti0.94-x O2 thin films ( x <= 0.2). Optical and transport analyses demonstrate that doping Sn into Nb0.06Ti0.94O2 can reduce the refractivity while maintaining low resistivity and high transparency.
机译:Nb0.06Sn x Ti0.94-x O-2(x <= 0.3)薄膜通过具有不同Sn浓度的脉冲激光沉积法生长。通过组合技术,我们发现Sn浓度可以达到最大约x = 0.3,同时保持稳定的锐钛矿相和外延。揭示了折射率的掺杂浓度依赖性,其中在波长λ1处折射率降低。对于Nb0.06Sn0.3Ti0.64O2薄膜,估计= 500 nm为12.4%。 Sn掺杂引起的带隙蓝移可有助于扩展的Sn 5s轨道与TiO2导带的混合。 Nb0.06Sn x Ti0.94-x O2薄膜在室温下的电阻率较低,在室温下约为10(-4)Ωcm,在可见光区域内的内部透射率高达95%以上(x <= 0.2 )。光学和传输分析表明,将Sn掺杂到Nb0.06Ti0.94O2中可以降低折射率,同时保持低电阻率和高透明性。

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