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首页> 外文期刊>Journal of Physics, D. Applied Physics: A Europhysics Journal >Power dissipation analysis in N2O RF discharges using Monte Carlo modelling
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Power dissipation analysis in N2O RF discharges using Monte Carlo modelling

机译：使用Monte Carlo建模对N2O RF放电中的功耗进行分析

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摘要

In this paper, a microscopic approach for the calculation of partial and total power dissipation from energy losses by collisions is considered and applied in the case of N2O low pressure RF discharges. This approach is based on a Monte Carlo technique in a particle model permitting sampling of the energy deposited by different inelastic electron-N2O collisions. The calculated power densities presented in this paper are in good agreement with the experimental results and those obtained by the classical macroscopic formula based on spatio-temporal integration of the product of current density and electrical field. This microscopic approach presents, however, a major advantage in comparison with the classical method (which only offers the possibility to calculate the global power dissipation) by making possible the calculation of all the power density terms, thereby permitting one to examine the relative contribution of each collision process in the power dissipation. Its application to N2O electronegative discharges, at 503 K gas temperature, several RF voltages and two different gas pressures shows how the power is dissipated through electron-gas processes. The power density variation is found to be proportional to the electron density variation brought about by the changes in attachment (i.e. e + N2O -> N-2 + O-), detachment (i.e. NO- + N2O -> NO+ N2O + e) and ionization (i.e. e + N2O -> N2O+ + 2e) processes. The role of each of these processes is fully studied with our particle model in order to explain the dissipated power variation.
机译：在本文中，考虑了一种微观方法，可用于计算由于碰撞而产生的能量损耗所产生的部分和全部功率损耗，并将其应用于N2O低压RF放电情况下。该方法基于粒子模型中的蒙特卡洛技术，该模型允许对不同的非弹性电子-N2O碰撞所沉积的能量进行采样。本文提出的计算出的功率密度与实验结果以及通过基于电流密度和电场乘积的时空积分的经典宏观公式获得的功率密度非常吻合。然而，通过使所有功率密度项的计算成为可能，这种微观方法与经典方法（后者仅提供了计算总功率耗散的方法）相比具有一个主要优势，从而使人们可以检查功率因数的相对贡献。每个碰撞过程中的功耗。它在503 K气体温度，几个RF电压和两个不同气压下对N2O负电性放电的应用显示了如何通过电子-气体过程消散功率。发现功率密度变化与由于附着（即e + N2O-> N-2 + O-），脱离（即NO- + N2O-> NO + N2O + e）的变化而引起的电子密度变化成比例。电离（即e + N2O-> N2O + + 2e）过程。我们的粒子模型充分研究了每个过程的作用，以解释耗散功率的变化。

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