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TEA CO2 LASER ABLATION OF UPILEX POLYIMIDE

机译:UPILEX聚酰亚胺的茶二氧化碳激光烧蚀

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摘要

We report an experimental investigation of the absorption and ablation characteristics of the high-temperature polymer Upilex polyimide, using a line-tunable TEA CO2 laser. It is demonstrated that excellent quality through-holes (vias) can be produced in thin films of Upilex when the CO2 laser is tuned to a strongly absorbed wavelength as a result of thermal decomposition produced by laser heating of the bulk polymer. For weakly absorbed wavelengths, transmission and probe beam deflection measurements reveal an incubation effect in the ablation which is thought to be related to particulate contamination in the film. [References: 25]
机译:我们报告了使用线可调TEA CO2激光器对高温聚合物Upilex聚酰亚胺的吸收和烧蚀特性进行的实验研究。结果表明,当由于将大分子聚合物激光加热而产生的热分解将CO2激光调谐到强烈吸收的波长时,可以在Upilex的薄膜上形成优质的通孔(通孔)。对于弱吸收的波长,透射和探测光束的偏转测量揭示了消融中的孵化效果,这被认为与薄膜中的颗粒污染有关。 [参考:25]

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