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首页> 外文期刊>Journal of Physics, D. Applied Physics: A Europhysics Journal >Study of photothermal vibrations of semiconductor cantilevers near the resonant frequency
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Study of photothermal vibrations of semiconductor cantilevers near the resonant frequency

机译：谐振频率附近半导体悬臂的光热振动研究

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摘要

The elastic vibrations of semiconductor cantilevers, which were excited with a frequency-modulated laser, were studied theoretically and experimentally in this paper. The carrier density, temperature and elastic displacement distributions were obtained by using the theoretical model including plasma and thermoelastic effects. The results showed that the plasma wave had a significant influence on the vibrations. Using an interferometric setup the photothermal signals were investigated near the resonant frequency. The results showed that the experimental results were in good agreement with the theoretical ones.
机译：从理论和实验上研究了调频激光器激发的半导体悬臂的弹性振动。利用包括等离子体和热弹性效应在内的理论模型获得了载流子密度，温度和弹性位移分布。结果表明，等离子体波对振动有显着影响。使用干涉仪设置，在共振频率附近研究了光热信号。结果表明，实验结果与理论值吻合良好。

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