In this paper, some modelling approaches to describe direct current (dc) magnetron dischargesdeveloped in our research groups will be presented, including an analytical model, MonteCarlo simulations for the electrons and for the sputtered atoms, a hybrid Monte Carlo-fluidmodel and particle-in-cell-Monte Carlo collision simulations. The strengths and limitations ofthe various modelling approaches will be explained, and some characteristic simulation resultswill be illustrated. Furthermore, some other simulation methods related to the magnetrondevice will be briefly explained, more specifically for calculating the magnetic fielddistribution inside the discharge, and for describing the (reactive) sputtering.
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