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首页> 外文期刊>Journal of Physics, D. Applied Physics: A Europhysics Journal >A flexible platform for simulations of sputtering hollow cathode discharges for laser applications
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A flexible platform for simulations of sputtering hollow cathode discharges for laser applications

机译：灵活的平台，用于模拟激光应用中的溅射空心阴极放电

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摘要

The Plasimo modelling platform, extended with a cathode wall sputtering module is used to study the discharge processes and to optimise the design parameters of a sputtering hollow cathode discharge (HCD). We present Plasimo simulations of a HCD used for laser applications. A time dependent sub-model is used to describe the behaviour of the plasma species. The sputtering yield at the metallic boundaries is calculated using an empirical formula. Copper is chosen as the cathode material and the discharge operates in helium with a small admixture of argon for more efficient sputtering. The optimal conditions for lasing of the infra-red (IR) copper ion line (780.8 nm) that have been determined experimentally are used as input conditions for the simulation model. Calculations are made for various gas mixtures. The observed quantities are compared with the experimental data obtained for the same discharge geometry and operating conditions. The agreement between the measured data and the results from modelling indicates that the main reactions in the model are correctly described. Therefore, it is believed that this model can be used as a design tool in optimizing discharge studies for various applications based on the sputtering of the cathode material.
机译：Plasimo建模平台扩展了阴极壁溅射模块，用于研究放电过程并优化溅射空心阴极放电（HCD）的设计参数。我们介绍用于激光应用的HCD的Plasimo模拟。时间相关子模型用于描述血浆物质的行为。使用经验公式计算在金属边界处的溅射产率。选择铜作为阴极材料，并在氦气中加入少量氩气进行放电，以提高溅射效率。实验确定的用于发射红外（IR）铜离子线（780.8 nm）的最佳条件用作模拟模型的输入条件。计算各种气体混合物。将观察到的数量与在相同排放几何形状和操作条件下获得的实验数据进行比较。测量数据与建模结果之间的一致性表明正确描述了模型中的主要反应。因此，据信该模型可以用作基于阴极材料的溅射针对各种应用优化放电研究的设计工具。

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