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首页> 外文期刊>Journal of Physics, D. Applied Physics: A Europhysics Journal >Graded selective coatings based on irconium and titanium oxynitride
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Graded selective coatings based on irconium and titanium oxynitride

机译：基于铱和氧氮化钛的分级选择性涂料

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The aim of this study was the development and characterization of transition metal oxynitride multilayers for optical applications. The reactive RF magnetron sputtering technique in rotation mode was used for stacking of zirconium oxynitride (ZrNO) and titanium oxynitride (TiNO) nanolayers. The depositions were carried out in a reactive Ar+N2+O2 atmosphere by sputtering titanium and zirconium targets. By means of different substrate rotation speeds, the bilayer period has been changed in the range 11-20 nm. A multilayer deposition rate increasing with the bilayer period decreasing has been evaluated. Structural, compositional, mechanical and optical analyses have been performed. The x-ray diffraction spectra confirmed the formation of a multilayer structure with a nitride formation prevalence. Non-abrupt interfaces between the layers and non-uniform chemical composition (chemical intermixing) have been detected by transmission electron microscope (TEM) observations. The gradient interface structure turns out to be an advantage for the improvement of the mechanical properties. Higher hardness values were calculated by the Chicot–Lesage and Jonsson–Hogmark models for TiNO/ZrNO multilayer compared with monolayer TiNO and ZrNO coatings. Also SIMS analysis has confirmed a compositional interface grading but also an increase in oxygen content with decreasing substrate rotation speed or similarly with decreasing deposition rate. Moreover, a tuning of the optical properties, going from metallic behaviour to dielectric with the decrease in the substrate rotation speed has been gained. The variation of the deposition rate allows a sort of ‘regulation' of the oxygen incorporation with a precise tailoring of the optical properties. This result can be employed with the aim of depositing graded composition multilayer systems with a precise control of their optical selective wavelength properties. The improvement in the mechanical performance in graded oxynitride multilayer coatings would also allow an increase in the optical device lifetime.
机译：这项研究的目的是开发和表征用于光学应用的过渡金属氧氮化物多层膜。旋转模式下的反应式射频磁控溅射技术用于堆叠氧氮化锆（ZrNO）和氧氮化钛（TiNO）纳米层。通过溅射钛和锆靶在反应性Ar + N2 + O2气氛中进行沉积。通过不同的基板旋转速度，双层周期已在11-20 nm的范围内变化。已经评估了随着双层周期减少而增加的多层沉积速率。已经进行了结构，成分，机械和光学分析。 X射线衍射光谱证实形成具有氮化物形成普遍性的多层结构。层之间的非突变界面和不均匀的化学成分（化学混合）已通过透射电子显微镜（TEM）的观察进行了检测。事实证明，梯度界面结构对于改善机械性能是有利的。与单层TiNO和ZrNO涂层相比，通过Chicot-Lesage和Jonsson-Hogmark模型对TiNO / ZrNO多层膜计算出了更高的硬度值。 SIMS分析还证实了组成界面的分级，但是随着底物旋转速度的降低或类似地随着沉积速率的降低，氧含量的增加。而且，已经获得了随着基板旋转速度的降低而从金属行为变为电介质的光学特性的调整。沉积速率的变化允许对氧的引入进行“调节”，并精确调整光学性能。该结果可以用于沉积渐变组合物多层系统并精确控制其光学选择性波长特性的目的。梯度氧氮化物多层涂层中机械性能的改善也将允许光学器件寿命的增加。

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