Determining the electron temperature and the electron density by a simple collisional-radiative model of argon and xenon in low-pressure discharges

Zhu XM; Chen WC; Li J; Pu YK

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Determining the electron temperature and the electron density by a simple collisional-radiative model of argon and xenon in low-pressure discharges

机译：通过低压放电中氩气和氙气的简单碰撞辐射模型确定电子温度和电子密度

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A simple collisional-radiative model for argon and xenon is used, in conjunction with optical emission spectroscopy (line-ratio technique), to determine the electron temperature and electron density in low-pressure discharges containing argon and xenon. Satisfactory agreement is obtained between this method and the Langmuir probe for an inductively coupled plasma containing neon, argon and xenon. This method is applied for a capacitive discharge containing fluorocarbon, argon and xenon. The electron temperatures and electron densities obtained under various discharge conditions are compared with those reported in the literature by other techniques.

机译：将氩气和氙气的简单碰撞辐射模型与光发射光谱法（线比技术）结合使用，可以确定包含氩气和氙气的低压放电中的电子温度和电子密度。对于包含氖气，氩气和氙气的电感耦合等离子体，此方法与Langmuir探针之间获得了令人满意的协议。此方法适用于包含碳氟化合物，氩气和氙气的电容放电。将在各种放电条件下获得的电子温度和电子密度与文献中通过其他技术报道的电子温度和电子密度进行比较。

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《Journal of Physics, D. Applied Physics: A Europhysics Journal》 |2009年第2期|共8页
作者
Zhu XM; Chen WC; Li J; Pu YK;
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正文语种 eng
中图分类应用物理学;
关键词
OPTICAL-EMISSION SPECTROSCOPY; ENERGY DISTRIBUTION FUNCTION; IMPACT EXCITATION; CROSS-SECTIONS; COUPLED DISCHARGES; PLASMAS; FREQUENCY;

机译：光学发射光谱;能量分布函数;冲击激发;截面;耦合放电;等离子;频率;

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1. Determining the electron temperature and the electron density by a simple collisional-radiative model of argon and xenon in low-pressure discharges [J] . Zhu XM, Chen WC, Li J, Journal of Physics, D. Applied Physics: A Europhysics Journal . 2009,第2期

机译：通过低压放电中氩气和氙气的简单碰撞辐射模型确定电子温度和电子密度
2. Spectroscopic Measurement of the Electron Temperature and theMetastable Densities by Using a Simple Collisional-RadiativeModel in a Low-Pressure Inductively-Coupled Argon Plasma [J] . Young-Kwang LEE, Kwang-Tae HWANG, Min-Hyong LEE, Journal of the Korean Physical Society . 2008,第6期

机译：在低压电感耦合的氩等离子体中使用简单的碰撞 - RadiveModel来测量电子温度和题塑密度的光谱测量
3. Estimating electron temperature and density using improved collisional-radiative model in high-density RF argon plasma [J] . H. Horita, D. Kuwahara, H. Akatsuka, AIP Advances . 2021,第7期

机译：利用高密度RF氩等离子体中改进的碰撞 - 辐射模型估算电子温度和密度
4. Determination of the electron energy distribution functions in the low-pressure gas-mixture discharges by using an OES line-ratio method and a collisional-radiative model of argon and krypton [C] . X. M. Zhu, W. C. Chen, Y. K. Pu International Conference on Phenomena in Ionized Gases . 2011

机译：通过使用OES线比法和氩气和氪气局部辐射模型测定低压气体混合物排出中的电子能量分布功能
5. Plasma spectroscopic diagnostic tool using collisional-radiative models and its application to different plasma discharges for electron temperature and neutral density determination. [D] . Sciamma, Ella Marion. 2007

机译：使用碰撞辐射模型的等离子体光谱诊断工具及其在不同等离子体放电中用于电子温度和中性密度测定的应用。
6. Synthesis of AuPd alloyed nanoparticles via room-temperature electron reduction with argon glow discharge as electron source [O] . Manman Yang, Zongyuan Wang, Wei Wang, 2014

机译：氩辉光放电为电子源的室温电子还原法合成AuPd合金纳米粒子
7. Study of argon ions density and electron temperature and density in magnetron plasma by optical emission spectroscopy and collisional-radiative model [O] . Kirill E. Evdokimov, Maxim E. Konischev, Vladimir F. Pichugin, 2017

机译：用发射光谱和碰撞辐射模型研究磁控等离子体中氩离子密度和电子温度和密度
8. The selection of simple model atoms for calculations of electron density in nonequilibrium, low temperature Cs plasmas [R] . Dugan, J. V., Jr. 1967

机译：用于计算非平衡，低温Cs等离子体中电子密度的简单模型原子的选择

Determining the electron temperature and the electron density by a simple collisional-radiative model of argon and xenon in low-pressure discharges

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