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首页> 外文期刊>Journal of Physics, D. Applied Physics: A Europhysics Journal >Effect of the amorphous-to-crystalline transition in Ba0.5Sr0.5TiO3 thin films on optical and microwave dielectric properties
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Effect of the amorphous-to-crystalline transition in Ba0.5Sr0.5TiO3 thin films on optical and microwave dielectric properties

机译：Ba0.5Sr0.5TiO3薄膜中非晶-晶体转变对光学和微波介电性能的影响

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摘要

Thin films of Ba0.5Sr0.5TiO3 were deposited at ambient temperature on fused silica substrates by RF magnetron sputtering followed by post-deposition annealing at temperatures between 400 and 1000 degrees C. The post-deposition annealing resulted in an amorphous-crystalline phase transition in the films. The amorphous-crystalline transition is accompanied by an increase in the refractive index, a decrease in the optical band gap and an increase in the microwave dielectric constant. At 800 degrees C the films exhibit a refractive index of 2.21 at 550 nm, an optical band gap of 3.49 eV and a microwave dielectric constant of 265, all of which indicate the crystalline nature of the films. The films lose oxygen when annealed at high temperatures as evidenced by the optical and microwave dielectric behaviour. The observed behaviour is explained in terms of defect centres created in the form of oxygen vacancies due to the annealing process and the structural phase transition.
机译：在室温下，通过射频磁控溅射在熔融石英基板上沉积Ba0.5Sr0.5TiO3薄膜，然后在400至1000摄氏度之间进行后沉积退火。后沉积退火导致非晶态晶体相转变。电影。非晶态晶体转变伴随着折射率的增加，光学带隙的减小以及微波介电常数的增大。在800摄氏度下，薄膜在550 nm处的折射率为2.21，光学带隙为3.49 eV，微波介电常数为265，所有这些都表明了薄膜的晶体性质。薄膜在高温下退火时会失去氧气，这可以通过光学和微波介电行为来证明。根据退火过程和结构相变以氧空位形式产生的缺陷中心来解释观察到的行为。

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