...
  • 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Journal of Physics, D. Applied Physics: A Europhysics Journal >Modelling of diamond deposition microwave cavity generated plasmas
【24h】

Modelling of diamond deposition microwave cavity generated plasmas

机译：金刚石沉积微波腔产生等离子体的建模

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

Some aspects of the numerical modelling of diamond deposition plasmas generated using microwave cavity systems are discussed. The paper mainly focuses on those models that allow (i) designing microwave cavities in order to optimize the power deposition in the discharge and (ii) estimating the detailed plasma composition in the vicinity of the substrate surface. The development of hydrogen plasma models that may be used for the self-consistent simulation of microwave cavity discharge is first discussed. The use of these models for determining the plasma configuration, composition and temperature is illustrated. Examples showing how to use these models in order to optimize the cavity structure and to obtain stable process operations are also given. A transport model for the highly reactive H-2/CH4 moderate pressure discharges is then presented. This model makes possible the determination of the time variation of plasma composition and temperature on a one-dimensional domain located on the plasma axis. The use of this model to analyse the transport phenomena and the chemical process in diamond deposition plasmas is illustrated. The model is also utilized to analyse pulsed mode discharges and the benefit they can bring as far as diamond growth rate and quality enhancement are concerned. We, in particular, show how the model can be employed to optimize the pulse waveform in order to improve the deposition process. Illustrations on how the model can give estimates of the species density at the growing substrate surface over a wide domain of deposition conditions are also given. This brings us to discuss the implication of the model prediction in terms of diamond growth rate and quality.
机译：讨论了使用微波腔系统生成的金刚石沉积等离子体数值模型的某些方面。本文主要关注那些模型，这些模型允许（i）设计微波腔，以优化放电中的功率沉积，以及（ii）估计衬底表面附近的详细等离子体组成。首先讨论了可用于微波腔放电自洽模拟的氢等离子体模型的开发。说明了使用这些模型确定等离子体构型，组成和温度。还给出了示例，展示了如何使用这些模型来优化型腔结构并获得稳定的过程操作。然后介绍了高反应性H-2 / CH4中压放电的传输模型。该模型使得确定位于等离子体轴上的一维域上的等离子体组成和温度的时间变化成为可能。说明了使用该模型分析金刚石沉积等离子体中的传输现象和化学过程。该模型还用于分析脉冲模式放电，以及就钻石生长速度和质量提高而言，它们可以带来的好处。我们特别展示了如何使用该模型优化脉冲波形以改善沉积过程。还给出了有关该模型如何在较宽的沉积条件范围内估算生长中的基材表面物种密度的例证。这使我们讨论了钻石增长速度和质量方面模型预测的含义。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号