...
  • 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Journal of Physics, D. Applied Physics: A Europhysics Journal >Silicon oxide particle formation in RF plasmas investigated by infrared absorption spectroscopy and mass spectrometry
【24h】

Silicon oxide particle formation in RF plasmas investigated by infrared absorption spectroscopy and mass spectrometry

机译：通过红外吸收光谱和质谱研究RF等离子体中的氧化硅颗粒形成

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

In situ Fourier transform infrared absorption spectroscopy has been used to study the composition of particles formed and suspended in radio-frequency discharges of silane-oxygen-argon gas mixtures. The silane gas constumption was observed by infrared absorption. The stoichiometry of the produced particles depends on the silane flow rate and was compared with commercial colloidal silica. A small proportion of silane gas produces nanometric stoichiometric particles whereas a large proportion produces larger under-stoichiometric particles. Absorption spectroscopy was sufficiently sensitive to reveal particles too small to be visually observed by laser light scattering. Post-oxidation oi hydrogenated silicon particles trapped in an argon plasma was obtained by adding oxygen. Mass spectrometry oi negative and positive ions showed an extensive range oi ionic clusters which may be at the origin of the observed particle formation. A model based on an iterative reaction sequence gives a good agreement with the measured positive ion mass spectrum. [References: 34]
机译：原位傅立叶变换红外吸收光谱已用于研究硅烷-氧气-氩气混合物的射频放电中形成和悬浮的颗粒的组成。通过红外吸收观察到硅烷气体的消耗。产生的颗粒的化学计量取决于硅烷的流速，并与市售的胶体二氧化硅进行了比较。一小部分硅烷气体会产生纳米化学计量的颗粒，而大比例会产生较大的化学计量不足的颗粒。吸收光谱法足够灵敏，以至于发现太小而无法通过激光散射肉眼观察到的颗粒。通过添加氧气获得捕获在氩等离子体中的氧化后的氢化硅颗粒。质谱的负离子和正离子显示出较大范围的离子簇，这可能是观察到的颗粒形成的起点。基于迭代反应序列的模型与测得的正离子质谱图非常吻合。 [参考：34]

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号