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首页> 外文期刊>Journal of Physics, D. Applied Physics: A Europhysics Journal >The spatial profiles of charged particles in a multipolar magnetically confined Ar-O-2 plasma
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The spatial profiles of charged particles in a multipolar magnetically confined Ar-O-2 plasma

机译：多极磁约束Ar-O-2等离子体中带电粒子的空间分布

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摘要

The spatial profiles of charged particles in multipolar magnetically confined Ar-O-2 plasmas produced by do discharges are investigated by varying the total pressure from 2 to 10 mTorr, the discharge current from 10 to 90 mA and the oxygen content from 4 to 20%. The measured spatial negative ion and electron density profiles, which are approximated as a parabolic distribution and a uniform one except in the vicinity of the chamber wall, respectively, allow us to divide the entire discharge into three regions: (i) an electronegative region, (ii) an electropositive region and (iii) the sheath. The ratio of the negative ion density to the electron density measured at the centre increases with increasing oxygen content and pressure, but decreases with increasing discharge current. Oxygen content- and discharge current-dependences of the electronegative region's length are similar to those of the ratio, although the length does not strongly depend on the pressure. A global model, in which the flux balance equations for charged particles and a power balance equation for electrons are taken into account, to estimate plasma parameters such as the individual charged particle density and electron temperature is proposed, and then compared with the experimental results. [References: 27]
机译：通过将总压力从2改变为10 mTorr，将放电电流从10改变为90 mA，将氧含量从4％改变为20％，研究了do放电产生的多极磁约束Ar-O-2等离子体中带电粒子的空间分布。 。测得的空间负离子和电子密度分布图分别近似为抛物线分布和均匀分布，除了腔室壁附近，使我们可以将整个放电分为三个区域：（i）负电性区域， （ii）正电区和（iii）护套。在中心测得的负离子密度与电子密度之比随氧含量和压力的增加而增加，但随放电电流的增加而降低。负电区域的长度对氧气含量和放电电流的依赖性与比率的相似，尽管该长度并不强烈取决于压力。提出了一个全局模型，其中考虑了带电粒子的通量平衡方程和电子的功率平衡方程，以估计等离子体参数，例如单个带电粒子的密度和电子温度，然后与实验结果进行比较。 [参考：27]

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