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首页> 外文期刊>Journal of Physics, D. Applied Physics: A Europhysics Journal >Laser ablation rate of materials using the generated acoustic waves
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Laser ablation rate of materials using the generated acoustic waves

机译:利用产生的声波对材料进行激光烧蚀率

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摘要

It is shown that the acoustic waves generated during laser ablation can be used to determine the ablation threshold and the ablation rate for different fluences and depths and also to characterize the different regions of the process. On-line measurement of the individual ablation rate is possible by observation of the delay of the arrival of the acoustic wave to a piezoelectric detector located behind the sample. [References: 22]
机译:结果表明,在激光烧蚀过程中产生的声波可用于确定不同能量密度和深度的烧蚀阈值和烧蚀率,还可以表征工艺的不同区域。可以通过观察声波到达位于样品后面的压电检测器的延迟来在线测量单个消融率。 [参考:22]

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