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首页> 外文期刊>Journal of Physics, D. Applied Physics: A Europhysics Journal >Modelling the discharge region of a microwave generated hydrogen plasma
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Modelling the discharge region of a microwave generated hydrogen plasma

机译：模拟微波产生的氢等离子体的放电区域

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摘要

A zero-dimensional steady-state model of low-pressure (2-60 Torr) microwave-generated hydrogen plasmas was developed. The electron energy distribution function (EEDF) was determined using the Boltzmann equation, coupled to species, energy and power balances. The EEDF from the Boltzmann equation permitted computation of the rate constants and average electron temperature required for simultaneous solution to the six species balances, two for neutrals (H, H2) and four for charged (H+, H2+, H3+ and electron) species, and the energy balance. The average electron temperature and species concentrations were then employed in a power balance to check for self-consistency with the input power used to solve the Boltzmann equation. E/N values were appropriately adjusted after each iteration until self-consistency was achieved. The model provides information on the details of the transfer of power from electrons via various processes (ionization, dissociation, vibration, rotation) to the neutral species. The mechanism of energy loss from the neutrals (radiation, convection) is also computed, and thus gas temperature can be estimated. Indeed, for low-pressure (p < 15 Torr) plasmas the model yields accurate absolute gas temperatures as a function of pressure, including the fact that gas temperature rises steeply at pressures in excess of 15 Torr. This results from the fact that at low pressures a very large fraction of the input power is transmitted by the electrons to the molecular vibration modes, such that Tvib very much greater than Ttrans.
机译：建立了低压（2-60托）微波产生的氢等离子体的零维稳态模型。电子能量分布函数（EEDF）使用Boltzmann方程确定，并与物质，能量和功率平衡相关。玻尔兹曼方程中的EEDF允许计算速率常数和平均电子温度，以便同时求解六个物种的平衡，两个用于中性（H，H2），而四个用于带电（H +，H2 +，H3 +和电子）物种，以及能量平衡。然后将平均电子温度和物质浓度用于功率平衡，以检查与用于求解玻尔兹曼方程的输入功率之间的自洽性。 E / N值在每次迭代后进行适当调整，直到实现自洽。该模型提供了有关电子通过各种过程（电离，离解，振动，旋转）传递到中性物质的详细信息。还可以计算出中性线（辐射，对流）造成的能量损失机理，从而可以估算出气体温度。实际上，对于低压（p <15托）等离子体，该模型会产生准确的绝对气体温度随压力变化的函数，包括在压力超过15托时气体温度急剧上升的事实。这是由于这样的事实，即在低压下，很大一部分输入功率被电子传输到分子振动模式，从而使得Tvib比Ttrans大得多。

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