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首页> 外文期刊>Journal of Physics, D. Applied Physics: A Europhysics Journal >A time resolved laser study of hydrocarbon chemistry in H-2-CH4 surface wave plasmas
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A time resolved laser study of hydrocarbon chemistry in H-2-CH4 surface wave plasmas

机译：H-2-CH4表面波等离子体中烃化学的时间分辨激光研究

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Time resolved tunable infrared diode laser absorption spectroscopy has been used to detect the methyl radical and four related stable molecules, CH4, C2H2, C2H4 and C2H6, in H-2 surface wave plasmas (f = 2.45 GHz, power density approximate to 10-50 W cm(-3)) containing 10% methane under static conditions at different pressures (p = 0.1-4 Torr). For the first time, the time dependence of the conversion of methane to the methyl radical and three stable C-2 hydrocarbons was studied in a fixed discharge volume nearly up to a stationary state. The degree of dissociation of the methane precursor was found to increase by up to 96% in the stationary state, and the methyl radical concentration was measured to be in the range of 10(12)-10(13) molecules cm(-3). The concentrations of both C2H2 and C2H4 produced in the plasma showed a maximum at a distinct time before decreasing. In contrast, the C2H6 concentration was observed to increase with time to a nearly constant value between 6 X 10(12) and 2 X 10(14) molecules cm(-3) varying with pressure. Based on time resolved concentrations, conversion rates to the measured C-2 hydrocarbons (R-C(C2Hy) = 10(11)-10(13) molecules J(-1)) could be estimated in dependence on pressure in a surface wave discharge. The influence of diffusion on the spatial distribution of the hydrocarbon concentration in the discharge tube was considered. A qualitative model has been developed in order to describe the chemical processes and to identify the main plasma chemical reaction paths. [References: 58]
机译：时间分辨可调红外二极管激光吸收光谱已用于检测H-2表面波等离子体中的甲基和四个相关的稳定分子CH4，C2H2，C2H4和C2H6（f = 2.45 GHz，功率密度约为10-50 W cm（-3））在静态条件下，在不同压力下（p = 0.1-4 Torr）含有10％的甲烷。首次研究了在接近固定状态的固定排放量下，甲烷转化为甲基自由基和三种稳定的C-2烃的时间依赖性。发现甲烷前体的解离度在固定状态下增加高达96％，并且测得的甲基自由基浓度在10（12）-10（13）分子cm（-3）范围内。血浆中产生的C2H2和C2H4浓度在下降之前的不同时间均显示出最大值。相反，观察到C2H6浓度随时间增加至6 X 10（12）和2 X 10（14）分子cm（-3）随压力变化的近似恒定值。根据时间分辨的浓度，可以根据表面波放电中的压力估算向测得的C-2碳氢化合物（R-C（C2Hy）= 10（11）-10（13）分子J（-1）的转化率。考虑了扩散对放电管中碳氢化合物浓度的空间分布的影响。为了描述化学过程并确定主要的等离子体化学反应路径，已经开发了定性模型。 [参考：58]

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