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首页> 外文期刊>Journal of Physics, D. Applied Physics: A Europhysics Journal >A 'blurred film' model in polarized light reflectometry for characterization of thick films and surface layers
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A 'blurred film' model in polarized light reflectometry for characterization of thick films and surface layers

机译:偏振光反射法中的“模糊膜”模型,用于表征厚膜和表面层

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摘要

Analytical solutions for determination of the real part of the refractive index and the absorbance of a weakly absorbing film on an opaque substrate by measurement only reflectance of the polarized light at certain characteristic incident angles (grazing angle and the Brewster angle at the ambient-film interface) are derived in the framework of the interferenceless film model. For a thick transparent film and transparent substrate in the polychromatic light of a constant spectral distribution, the adopted method allows determination of the refractive index of a film using only the normal incidence reflectance measurement. This approach may be especially useful for monitoring the refractive index and its variations in the process of deposition of mixtures to produce intermediate indices. An interferenceless blurred film model corresponds to the linear thickness variation over the illuminated sample area or the rectangular spectral distribution of the polychromatic light. [References: 16]
机译:通过仅测量在某些特征入射角(环境膜界面处的掠射角和布儒斯特角)的偏振光的反射率来确定不透明基材上弱吸收膜的折射率的实部和吸收率的解析方法)是在无干扰胶片模型的框架中得出的。对于具有恒定光谱分布的多色光中的厚的透明膜和透明基板,采用的方法允许仅使用法向入射反射率测量来确定膜的折射率。该方法对于在混合物沉积以产生中间折射率的过程中监测折射率及其变化可能特别有用。无干扰的模糊胶片模型对应于照明样品区域上的线性厚度变化或多色光的矩形光谱分布。 [参考:16]

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