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首页> 外文期刊>Journal of Physics, D. Applied Physics: A Europhysics Journal >Observation of the transition of operating regions in a low-pressure inductively coupled oxygen plasma by Langmuir probe measurement and optical emission spectroscopy
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Observation of the transition of operating regions in a low-pressure inductively coupled oxygen plasma by Langmuir probe measurement and optical emission spectroscopy

机译：通过Langmuir探针测量和光发射光谱法观察低压感应耦合氧等离子体中的工作区域过渡

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In inductively coupled low-pressure oxygen plasmas, planar Langmuir probes were used to determine the variation of the plasma parameters (positive and negative ion densities, electron density, electron temperature) with applied pressure (1-40 mTorr) and power (1-800 W). Simultaneous optical emission spectra were obtained. The relative abundance of the species was estimated from the intensities of the two spectral lines from excited oxygen atoms and molecular oxygen ions. In conjunction with the Langmuir probe data, the scaling behaviours of the charged and neutral species were investigated. A change of scaling behaviour in charged and neutral species densities which was due to the transition from the ion-flux-loss-dominated region to the recombination-loss-dominated region was observed by Langmuir probe measurement and optical emission spectroscopy. [References: 32]
机译：在感应耦合低压氧气等离子体中，使用平面Langmuir探针确定施加压力（1-40 mTorr）和功率（1-800）时等离子体参数（正负离子密度，电子密度，电子温度）的变化。 W）。获得了同时的光发射光谱。从激发的氧原子和分子氧离子的两条光谱线的强度估算出物种的相对丰度。结合Langmuir探针数据，研究了带电和中性物质的水垢行为。通过Langmuir探针测量和光发射光谱法观察到，由于从离子通量损失占主导的区域到重组损失占优势的区域的转变，带电和中性物种密度的缩放行为变化。 [参考：32]

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