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首页> 外文期刊>Journal of Physics, D. Applied Physics: A Europhysics Journal >Oxygen diluted hexamethyldisiloxane plasmas investigated by means of in situ infrared absorption spectroscopy and mass spectrometry
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Oxygen diluted hexamethyldisiloxane plasmas investigated by means of in situ infrared absorption spectroscopy and mass spectrometry

机译：氧气稀释的六甲基二硅氧烷等离子体的原位红外吸收光谱和质谱研究

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摘要

The gas phase species produced in rf plasmas of hexamethyldisiloxane (HMDSO), Si2O(CH3)(6), diluted with oxygen, have been investigated. The complementarity of Fourier transform infrared absorption spectroscopy and mass spectrometry allows the determination of the most abundant neutral components present in the discharge. The measurements reveal that methyl groups (CH3), abundantly formed by the dissociation of the HMDSO molecule, are the precursor for the most abundant species which stem from two kinds of reaction. The first kind of reaction is combustion of CH3 by oxygen-producing formaldehyde (COH2), formic acid (CO2H2), carbon monoxide (CO), carbon dioxide (CO2) and water. It is shown that high mass carbonated radicals, such as SixOyCzHt, first diffuse to the surface and then the carbon is removed by oxygen etching to form CO2. The second is hydrocarbon chemistry promoted by CH3, producing mainly hydrogen (H-2), methane (CH4) and acetylene (C2H2). [References: 21]
机译：已经研究了用氧气稀释的六甲基二硅氧烷（HMDSO），Si2O（CH3）（6）的射频等离子体中产生的气相物质。傅里叶变换红外吸收光谱法和质谱法的互补性使得可以确定放电中存在的最丰富的中性成分。测量结果表明，由HMDSO分子解离而大量形成的甲基（CH3）是源自两种反应的最丰富物种的前体。第一种反应是生成氧气的甲醛（COH2），甲酸（CO2H2），一氧化碳（CO），二氧化碳（CO2）和水燃烧CH3。结果表明，高质量的碳酸盐自由基（例如SixOyCzHt）首先扩散到表面，然后通过氧蚀刻除去碳以形成CO2。第二个是由CH3促进的烃化学反应，主要产生氢（H-2），甲烷（CH4）和乙炔（C2H2）。 [参考：21]

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