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首页> 外文期刊>Journal of Physics, D. Applied Physics: A Europhysics Journal >Application of the dielectric barrier discharge to detect defects in a teflon coated metal surface
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Application of the dielectric barrier discharge to detect defects in a teflon coated metal surface

机译：应用介电势垒放电检测特氟龙涂层金属表面的缺陷

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摘要

In the semiconductor industry, flexible stainless steel tubes, the inside of which are coated with thick Teflon films, by the splay coating method, have been used to prevent their degradation and erosion by organic solvents. We have developed an inspection system to detect pinholes and cracks in the deposited Teflon films, and the dielectric barrier discharge (DBD) was employed to reduce residual substances and damages to the coated film in the tube. Conducting water contained in the cylinder-like glass pipe was used as a liquid electrode to apply a high voltage at any portion of the tube tested. A defective part with a pinhole was modelled by a point electrode in this experiment, because the uncoated defective part has a lower electric breakdown voltage. High frequency voltage (10 kHz) was applied between the point electrode and the liquid electrode. The level of the liquid electrode was varied to detect the occurrence of a microdischarge. It is found that the number of current pulses due to the microdischarge can be used to estimate the size and location of the defective uncoated point of the sample tube. [References: 2]
机译：在半导体工业中，已经采用了挠性不锈钢管，其内部通过八角涂层法涂有厚的聚四氟乙烯薄膜，以防止其被有机溶剂降解和腐蚀。我们开发了一种检测系统，以检测沉积的特氟龙薄膜中的针孔和裂纹，并采用介电势垒放电（DBD）来减少残留物质和对管中涂层薄膜的损坏。圆柱状玻璃管中包含的导电水被用作液体电极，以在被测管的任何部分施加高压。在该实验中，通过点电极对具有针孔的不良部位进行建模，因为未涂布的不良部位的击穿电压较低。在点电极和液体电极之间施加高频电压（10 kHz）。改变液体电极的水平以检测微放电的发生。已经发现，由于微放电而产生的电流脉冲的数量可以用于估计样品管的有缺陷的未涂覆点的尺寸和位置。 [参考：2]

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