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首页> 外文期刊>Journal of Physics, D. Applied Physics: A Europhysics Journal >Modelling of microdischarge devices: plasma and gas dynamics
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Modelling of microdischarge devices: plasma and gas dynamics

机译：微放电装置的建模：等离子体和气体动力学

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Microdischarge devices (MDs) share many properties with their macroscopic counterparts while having unique features resulting from their ability to sustain large current densities and power depositions on a continuous basis at pressures approaching atmospheric. The dynamics of cylindrical, metal-dielectric-metal sandwich MDs sustained in Ar having characteristic sizes of a few hundred micrometres have been computationally investigated using a plasma-tran sport model which includes gas dynamics. We found that these devices closely resemble negative glow discharges, as they are sustained by, and particularly sensitive to, ionization resulting from secondary electron emission from the cathode. Since these MDs operate on a cw basis with large current densities and power deposition, gas heating and flow dynamics are important considerations in optimizing their electrical and kinetic properties. For example, the formation of excimer species is particularly sensitive to gas heating and rarefaction due to their dependence on three-body formation processes. Scalings of MDs with pressure, current and secondary emission coefficient are discussed.
机译：微放电装置（MDs）与宏观放电装置具有许多共同的特性，同时由于其能够在接近大气压的压力下连续维持大电流密度和功率沉积的能力而具有独特的功能。使用包括气体动力学的等离子迁移运动模型，对在Ar中保持的具有几百微米特征尺寸的圆柱形金属-电介质-金属夹层MD的动力学进行了研究。我们发现，这些器件非常类似于负辉光放电，因为它们受到阴极二次电子发射所产生的电离的影响，并且特别敏感。由于这些MD在大电流密度和功率沉积的基础上连续工作，因此在优化其电和动力学特性时，气体加热和流动动力学是重要的考虑因素。例如，准分子物质的形成由于对三体形成过程的依赖性而对气体加热和稀疏特别敏感。讨论了具有压力，电流和二次发射系数的MD的缩放比例。

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