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首页> 外文期刊>Journal of Sol-Gel Science and Technology >Elimination of porosity in heavily rare-earth doped sol-gel derived silicate glass films
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Elimination of porosity in heavily rare-earth doped sol-gel derived silicate glass films

机译：消除重稀土掺杂溶胶-凝胶衍生的硅酸盐玻璃薄膜中的孔隙

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摘要

The combination of spin-coating and rapid thermal annealing is a very important sol-gel technique to prepare high quality silicate glass films, widely used in the fabrication of waveguides, photonic bandgap structures and other film-based optical devices. This work found that high rare-earth concentrations will seriously affect the optical quality of the films prepared by the spin-coating/rapid thermal annealing process, with pores with hundreds of nanometres in size being found in heavily rare-earth doped aluminosilicate glass films, causing significant light scattering. However, it was also found that a new recipe using acetylacetone was able to dramatically eliminate these pores and to improve the film optical quality, even for rare-earth concentrations as high as 15 mol%. This result will be useful for the fabrication of sol-gel derived devices based on rare-earth doped silicate glass films like active waveguides, functional films and photonic bandgap structures.
机译：旋涂和快速热退火相结合是制备高质量硅酸盐玻璃薄膜的非常重要的溶胶-凝胶技术，广泛用于制造波导，光子带隙结构和其他基于薄膜的光学器件。这项工作发现，高浓度的稀土元素将严重影响通过旋涂/快速热退火工艺制备的薄膜的光学质量，在高度掺杂稀土的硅铝酸盐玻璃薄膜中会发现尺寸为数百纳米的孔，导致大量的光散射。但是，还发现即使使用高达15 mol％的稀土，使用乙酰丙酮的新配方也能够显着消除这些孔并改善薄膜的光学质量。该结果对于基于稀土掺杂的硅酸盐玻璃膜（例如有源波导，功能膜和光子带隙结构）的溶胶-凝胶衍生的器件的制造将是有用的。

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