...
  • 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Journal of surface investigation: x-ray, synchrotron and neutron techniques >Influence of Surface Corrugation on the Sputtering of Carbon Materials under High-Fluence Ion Bombardment
【24h】

Influence of Surface Corrugation on the Sputtering of Carbon Materials under High-Fluence Ion Bombardment

机译：高能离子轰击下表面波纹对碳材料溅射的影响

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

The results of experimental and computer-based studies of the sputtering and erosion of carbonmaterial surfaces under high-fluence irradiation with 30-keV Ar~+ ions at various angles of ion incidence are given. The irradiation of highly oriented pyrolytic graphite (HOPG) and polyacrylonitrile fibers of carbon– carbon composites, which are characterized by surface corrugation, is considered. A model is proposed for taking into account the influence of parameters of symmetric corrugation on the characteristics of sputtering of the irradiated materials. Calculation shows that taking experimental values of the corrugation slopes into account allows one to explain the angular dependence of the sputtering yield of HOPG. It is found that the pronounced (about two times) suppression of sputtering within the range of incidence angles of 60°–80° is connected with the rear (relative to the ion beam) faces of the corrugation being obscured. Unlike the case of the normal incidence of ions, the sputtering yield at large incidence angles decreases as the corrugation period increases due to blocking of the sputtering of the rear and neighboring faces of microrelief elements.
机译：给出了在30keV Ar〜+离子的高通量辐照下，碳材料表面在各种离子入射角下的溅射和腐蚀实验和基于计算机的研究结果。考虑了以表面波纹为特征的高定向热解石墨（HOPG）和碳-碳复合材料的聚丙烯腈纤维的辐照。提出了一种考虑对称波纹参数对辐照材料溅射特性影响的模型。计算表明，考虑到波纹斜率的实验值，可以解释HOPG溅射产率的角度依赖性。结果发现，在60°-80°入射角范围内，对溅射的明显抑制（大约两次）与波纹的背面（相对于离子束）不透明有关。与离子的法向入射不同，大波纹角的溅射产率由于波纹周期的增加而降低，这是由于微浮雕元件的背面和相邻面的溅射受阻。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号