Estimation of detection limits in electron probe X-ray microanalysis

Romanenko I.M.; Viryus A.A.; Churin V.A.; Deyanov A.S.; Ivanov A.S.

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Estimation of detection limits in electron probe X-ray microanalysis

机译：电子探针X射线微分析中检测限的估计

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Different local methods of analysis are estimated with the aim of revealing the possibility for determining the minimum concentrations of chemical elements. Among all examined approaches, electron probe X-ray microanalysis (EPMA) has been chosen as the most accurate and promising technique. The dependences between the elemental detection limit and the analyzer's technical parameters are investigated. It has been ascertained that the experimentally determined detection limits of light elements are substantially higher than those of heavy elements. The reasons leading to the less efficient EPMA of light elements, as well as possible ways of elimination thereof, are discussed. It is demonstrated that an X-ray mirror can be used to reach the theoretically predicted detection limits of B, O, and C.

机译：为了揭示确定最小化学元素浓度的可能性，估计了不同的局部分析方法。在所有检查的方法中，电子探针X射线微分析（EPMA）已被选为最准确和最有前途的技术。研究了元素检出限与分析仪技术参数之间的关系。已经确定，实验确定的轻元素的检测极限明显高于重元素的检测极限。讨论了导致发光元件的EPMA效率较低的原因，以及消除它们的可能方法。已证明X射线镜可用于达到B，O和C的理论预测检测极限。

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《Journal of surface investigation: x-ray, synchrotron and neutron techniques》 |2012年第4期|共7页
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Romanenko I.M.; Viryus A.A.; Churin V.A.; Deyanov A.S.; Ivanov A.S.;
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正文语种 eng
中图分类原子核物理学、高能物理学;
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1. Estimation of detection limits in electron probe X-ray microanalysis [J] . Romanenko I.M., Viryus A.A., Churin V.A., Journal of surface investigation: x-ray, synchrotron and neutron techniques . 2012,第4期

机译：电子探针X射线微分析中检测限的估计
2. Minimum detection limit and spatial resolution of thin-sample field-emission electron probe microanalysis [J] . Yugo Kubo, Kotaro Hamada, Akira Urano Ultramicroscopy . 2013,第Null期

机译：薄样品场发射电子探针显微分析的最小检测限和空间分辨率
3. EDX-Spectra Simulation in Electron Probe Microanalysis. Optimization of Excitation Conditions and Detection Limits [J] . Frank Eggert Microchimica Acta . 2006,第1a2期

机译：电子探针显微分析中的EDX谱模拟。励磁条件和检出限的优化
4. MODELLING OF X-RAY EMISSION IN ELECTRON PROBE MICROANALYSIS BASED ON DETERMINISTIC TRANSPORT EQUATIONS [C] . J. Bunger, S. Richter, M. Torrilhon 15th European workshop on modern developments and applications in microbean analysis, 7th meeting of the International Union of Microbean Analysis Societies . 2017

机译：基于确定性传输方程的电子探针显微分析中的X射线辐射建模
5. Optimisation and application of different electron probe X-ray microanalysis approaches for the chemical characterisation of individual environmental particles. [D] . De Maeyer-Worobiec, Anna. 2004

机译：不同电子探针X射线显微分析方法对单个环境粒子的化学表征的优化和应用。
6. Barriers to Quantitative Electron Probe X-Ray Microanalysis for Low Voltage Scanning Electron Microscopy [O] . Dale E. Newbury 2002

机译：用于低压扫描电子显微镜的定量电子探针X射线显微分析的障碍
7. Detection limit by electron probe microanalysis [O] . Shunzo Yui, Yoshinori Fujiki 1976

机译：电子探针微基分析检测限
8. Mass Determination Based on Electron Scattering in Electron Probe X-Ray Microanalysis of Thin Biological Specimens [R] . Linders, P. W. J. 1984

机译：基于电子散射的薄生物标本电子探针X射线微量分析质谱测定

Estimation of detection limits in electron probe X-ray microanalysis

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