Measurements of Scan Nonlinearity in a Scanning Electron Microscope

Yu. A. Novikov

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Measurements of Scan Nonlinearity in a Scanning Electron Microscope

机译：扫描电子显微镜中扫描非线性的测量

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摘要

A method for measuring the scan nonlinearity of a scanning electron microscope is discussed. This method is tested using a mass-produced microscope and demonstrates good results.

机译：讨论了一种用于测量扫描电子显微镜的扫描非线性的方法。使用大量生产的显微镜对该方法进行了测试，并证明了良好的结果。

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《Journal of surface investigation: x-ray, synchrotron and neutron techniques》 |2013年第6期|共5页
作者
Yu. A. Novikov;
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原文格式 PDF
正文语种 eng
中图分类原子核物理学、高能物理学;
关键词
Measurements; Microscope; Nonlinearity;

机译：测量;显微镜;非线性;

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专利

1. Measurements of Scan Nonlinearity in a Scanning Electron Microscope [J] . Yu. A. Novikov Journal of surface investigation: x-ray, synchrotron and neutron techniques . 2013,第6期

机译：扫描电子显微镜中扫描非线性的测量
2. Round-robin measurements of 100- and 60-nm scales among a deep-ultraviolet laser diffractometer, a scanning electron microscope and various atomic force microscopes [J] . Ichiko Misumi, Satoshi Gonda, Osamu Sato, Measurement Science & Technology . 2007,第3期

机译：在深紫外激光衍射仪，扫描电子显微镜和各种原子力显微镜之间对100和60 nm刻度进行循环测量
3. Comparison of Electron Imaging Modes for Dimensional Measurements in the Scanning Electron Microscope [J] . Postek Michael T., Vladar Andras E., Villarrubia John S., Microscopy and microanalysis: The official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada . 2016,第4期

机译：在扫描电子显微镜中进行尺寸测量的电子成像模式的比较
4. Nonlinearity in scanning electron microscope critical dimension measurements introduced by the edge detection algorithm [C] . Robert R. Hershey, Motorola, Inc., Integrated Circuit Metrology, Inspection, and Process Control VII . 1993

机译：边缘检测算法在扫描电子显微镜临界尺寸测量中的非线性
5. Electronic Single Molecule Measurements with the Scanning Tunneling Microscope. [D] . Im, Jong One. 2016

机译：使用扫描隧道显微镜的电子单分子测量。
6. Comparison of Electron Imaging Modes for Dimensional Measurements in the Scanning Electron Microscope [O] . Michael T. Postek, András E. Vladár, John S. Villarrubia, -1

机译：在扫描电子显微镜中进行尺寸测量的电子成像模式的比较
7. Application of immunohistochemical staining to scanning electron microscopy - A new method of comparative studies of the same cells with light microscope and scanning electron microscope. [O] . Hidemitsu MIZUUCHI, Ryuichi KUDO, Hajime TAMURA, 1986

机译：免疫组织化学染色在扫描电子显微镜中的应用 - 一种用光学显微镜和扫描电子显微镜对同一细胞比较研究的新方法。

Measurements of Scan Nonlinearity in a Scanning Electron Microscope

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