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首页> 外文期刊>Journal of the Chinese Society of Mechanical Engineers, Series C: Transactions of the Chinese Society of Mechanical Engineers >Structural Design of a Silicon Six-Wafer Micro-Combustor under the Effect of Heat Transfer Boundary Condition at the Outer Walls
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Structural Design of a Silicon Six-Wafer Micro-Combustor under the Effect of Heat Transfer Boundary Condition at the Outer Walls

机译：外壁传热边界条件影响下的硅六晶圆片微燃烧器的结构设计

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摘要

The objective of this paper is to establish a methodology for designing highly stressed micro fabricated structures. Some research results indicate that the flame burns in the recirculation jacket if the poor heat transfer coefficients at the outer wall are present, and that the combustion in the recirculation jacket possibly damages the micro-combustor due to the fact that silicon has relatively poor high temperature strength and creep resistance. In order to explore the structural design of the micro-combustor with the flame burning in the recirculation jacket, combustion characteristics of the combustor were analyzed using 2D Computational Fluid Dynamics (CFD) simulation, and then the 3D Finite Element Method was utilized for thermo-mechanical analysis on the combustor. The simulation results identified that the locations of the critical failure could possibly occur at the burning areas in the recirculation jacket. The results of this study can be used for the design and improvement of the micro-combustors.
机译：本文的目的是建立一种设计高应力微加工结构的方法。一些研究结果表明，如果在外壁处存在较差的传热系数，则火焰会在再循环套中燃烧，并且由于硅的高温相对较差，再循环套中的燃烧可能会损坏微燃烧器。强度和抗蠕变性。为了探索在再循环夹套中燃烧火焰的微型燃烧器的结构设计，使用2D计算流体力学（CFD）模拟分析了燃烧器的燃烧特性，然后将3D有限元方法用于热力燃烧。燃烧室的机械分析。仿真结果表明，严重故障的位置可能发生在再循环夹套的燃烧区域。这项研究的结果可用于微型燃烧器的设计和改进。

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