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首页> 外文期刊>Journal of Ceramic Processing Research. (Text in English) >Ultra precision polishing of Si3N4 ceramics using magnetorheological fluids and diamond abrasives
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Ultra precision polishing of Si3N4 ceramics using magnetorheological fluids and diamond abrasives

机译：使用磁流变液和金刚石磨料对Si3N4陶瓷进行超精密抛光

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摘要

Si3N4 ceramics were prepared by hot-pressing at 1800 °C for 2 h. Firstly,the microstructure and mechanical properties of Si3N4 ceramics with sintering aids of 8 mol% Y2O3+6mol% Al2O3 were investigated. The Si3N4 ceramics showed excellent mechanical properties. Grain bridging and pullout were observed during the Vickers indentation crack propagation,implying that they are possible toughening mechanisms for Si3N4 ceramics. The secondary phase was identified as Y_(10)Al2Si3O_(18)N4 (YAlSiON),which was formed by the reaction with the sintering aids,Si3N4,and SiO2. Secondly,ultra precision polishing experiments for Si3N4 ceramics were performed using magnetorheological fluids (MR fluids) and diamond slurries. A series of experiments were performed under various polishing conditions by changing the current intensity and spindle speed for a given time period of 10 minutes. The machined surfaces were observed using a SEM and surface profiler to investigate the surface integrity changes. As a result,a very fine surface roughness of Ra = 1.012 nm was obtained within 10 minutes when the electric current was 2 A and the wheel speed was 300 rpm. Also,it was observed that the MR polishing method can provide excellent surface roughness compared with the existing lapping methods.
机译：通过在1800°C下热压2 h来制备Si3N4陶瓷。首先，研究了烧结助剂为8 mol％Y2O3 + 6mol％Al2O3的Si3N4陶瓷的微观结构和力学性能。 Si3N4陶瓷具有出色的机械性能。在维氏压痕裂纹扩展过程中观察到晶粒桥接和拉拔，这表明它们可能是Si3N4陶瓷的增韧机制。第二相称为Y_（10）Al2Si3O_（18）N4（YAlSiON），它是通过与烧结助剂Si3N4和SiO2反应形成的。其次，使用磁流变液（MR液）和金刚石浆料对Si3N4陶瓷进行了超精密抛光实验。通过在给定的10分钟时间内更改电流强度和主轴转速，在各种抛光条件下进行了一系列实验。使用SEM和表面轮廓仪观察加工后的表面，以调查表面完整性的变化。结果，当电流为2 A且轮速为300 rpm时，在10分钟内获得了非常好的Ra = 1.012 nm的表面粗糙度。此外，已经观察到，与现有的研磨方法相比，MR抛光方法可以提供优异的表面粗糙度。

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