Local Microscopic Observation of Passive Integrated Circuits by Focused Ion Beam System

Yuji Nishi; Yuji Matsushita; Yoshiki Iwazaki; Masayuki Fujimoto

首页> 外文期刊>日本セラミックス協会学術論文誌 >Local Microscopic Observation of Passive Integrated Circuits by Focused Ion Beam System

【24h】

Local Microscopic Observation of Passive Integrated Circuits by Focused Ion Beam System

机译：聚焦离子束系统对无源集成电路的局部显微观察

获取原文

获取原文并翻译 | 示例

掌桥外文数据库（机构版） >>

开具论文收录证明 >>

文献代查 >>

页面导航

摘要
著录项
相似文献
相关主题

摘要

Focused ion beam (FIB) system was applied to sample preparation for local microscopic observation of pas-sive thin-film elements integrated into a semiconductor substrate. The newly developed microsampling method is suitable not only for scanning electron microscopy (SEM) observation but also for transmission electron microscopy (TEM) observation. By adopting this method, microstructures and their ramifications in SrTiO_3 MIM (metal-insulator-metal) thin-film capacitors fabricated on integrated circuits were clearly revealed.

机译：将聚焦离子束（FIB）系统应用于样品制备，以便对集成到半导体衬底中的无源薄膜元件进行局部显微镜观察。新开发的微量采样方法不仅适用于扫描电子显微镜（SEM）观察，还适用于透射电子显微镜（TEM）观察。通过这种方法，清楚地揭示了在集成电路上制造的SrTiO_3 MIM（金属-绝缘体-金属）薄膜电容器的微观结构及其分枝。

著录项

来源
《日本セラミックス協会学術論文誌》 |2002年第1281期|共4页
作者
Yuji Nishi; Yuji Matsushita; Yoshiki Iwazaki; Masayuki Fujimoto;
展开▼
作者单位

展开▼
收录信息
原文格式 PDF
正文语种 eng
中图分类陶瓷工业;
关键词
thin film capacitor; integration; microstructure; FIB; TEM;

机译：薄膜电容器集成微观结构FIB TEM;

相似文献

外文文献
中文文献
专利

1. Local Microscopic Observation of Passive Integrated Circuits by Focused Ion Beam System [J] . Yuji Nishi, Yuji Matsushita, Yoshiki Iwazaki, 日本セラミックス協会学術論文誌 . 2002,第1281期

机译：聚焦离子束系统对无源集成电路的局部显微观察
2. Improving the Yield and Turn-Around Time of Focused Ion Beam Microsurgery of Integrated Circuits by LCVD Method [J] . Remes J., Vahakangas J., Uusimaki A. Advanced Packaging, IEEE Transactions on . 2009,第2期

机译：用LCVD方法改善集成电路聚焦离子束显微外科手术的良率和周转时间
3. Domain patterning thin crystalline ferroelectric film with focused ion beam for nonlinear photonic integrated circuits [J] . Xijun Li, Kazuya Terabe, Hideki Hatano, Journal of Applied Physics . 2006,第10期

机译：用聚焦离子束对非线性光子集成电路进行畴构图的铁电薄膜
4. High Aspect Ratio Via Milling Endpoint Phenomena in Focused Ion Beam Modification of Integrated Circuits [C] . Valery Ray International Symposium for Testing and Failure Analysis(ISTFA 2004); 20041114-18; Worcester(Boston),MA(US) . 2004

机译：集成电路中聚焦离子束改性中通过铣削终点现象产生的高纵横比
5. Passive Focusing of Intense Ion Beams. [D] . Yuen, Albert. 2016

机译：强烈聚焦离子束的被动聚焦。
6. Development of an Integrated Microfluidic Perfusion Cell Culture System for Real-Time Microscopic Observation of Biological Cells [O] . Lung Lin Jr, Shih-Siou Wang, Min-Hsien Wu, 2011

机译：用于生物细胞实时显微镜观察的集成微流灌注细胞培养系统的开发
7. Development of an Integrated Microfluidic Perfusion Cell Culture System for Real-Time Microscopic Observation of Biological Cells [O] . Lin, Lung, Wang, Shih-Siou, Wu, Min-Hsien, 2011

机译：用于生物细胞实时显微镜观察的集成微流灌注细胞培养系统的开发
8. Focused Ion Beam Damage to MOS Integrated Circuits [R] . Fleetwood, D. M. , Campbell, A. N. , Hembree, C. E. , 2000

机译：聚焦离子束对mOs集成电路的损害

Local Microscopic Observation of Passive Integrated Circuits by Focused Ion Beam System

摘要

著录项

相似文献

相关主题

期刊订阅