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Development of confocal laser scanning microscope with a Raman spectroscopy interface for MEMS characterization

机译：具有拉曼光谱接口的共焦激光扫描显微镜的开发用于MEMS表征

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The use of micro-electro-mechanical system (MEMS) is becoming popular in many application. To predict fracture, buckling of structure, etc., knowledge of the mechanical stress properties in MEMS devices is very important. The experimental characterization of the mechanical stress properties, either stand alone, or as a verifying tool for analyticalumerical approach is very important, but there are not many techniques available that are capable of measuring the stress locally on surface as small as that of a typical MEMS device. A possible candidate is micro-Raman spectroscopy. It is well known that Raman spectroscopy can be used to characterize stresses with micron spatial resolution. Several researcher have used micro-Raman spectroscopy to measure the mechanical stress in MEMS structure. Moreover, the measurements of deflection are also important in MEMS characterization. Confocal Laser scanning Microscopes (CLSM) are very attractive for three-dimensional imaging of microstructures because of its high lateral and axial resolution and its optical sectioning capability. So, for quality preservation in MEMS structure, CLSM is best suited. By combining with a micro-Raman spectroscope, not only deflection measurement but also mechanical stress analysis in the same area can be performed. In this study, we developed CLSM with a Raman spectroscopy interface and demonstrate measurement of mechanical stress and deflection using this system.
机译：在许多应用中，微机电系统（MEMS）的使用正变得越来越普遍。为了预测断裂，结构屈曲等，了解MEMS器件中的机械应力特性非常重要。机械应力特性的实验表征，无论是单独使用还是作为分析/数值方法的验证工具，都是非常重要的，但是，目前尚无许多技术能够像表面材料一样小地局部测量表面应力。典型的MEMS器件。可能的候选者是微拉曼光谱。众所周知，拉曼光谱可用于表征具有微米空间分辨率的应力。几位研究人员已使用微拉曼光谱法测量MEMS结构中的机械应力。此外，挠度的测量在MEMS表征中也很重要。共焦激光扫描显微镜（CLSM）由于其高的横向和轴向分辨率以及光学切片能力而非常适合用于微观结构的三维成像。因此，为了保持MEMS结构的质量，CLSM最适合。通过与微型拉曼光谱仪结合使用，不仅可以进行挠度测量，还可以在同一区域进行机械应力分析。在这项研究中，我们开发了具有拉曼光谱接口的CLSM，并演示了使用该系统测量机械应力和挠度的方法。

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