Fabrication of hollow waveguide and it's application to photonic integrated circuits - toward photonic integrated circuits based on hollow waveguide and MEMS

Toru Miura; Hisatomo Tanaka; Takahiro Sakaguchi; Fumio Koyama

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Fabrication of hollow waveguide and it's application to photonic integrated circuits - toward photonic integrated circuits based on hollow waveguide and MEMS

机译：空心波导的制造及其在光子集成电路中的应用-基于空心波导和MEMS的光子集成电路

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A tunable optical device is a key device for high speed and high capacity DWDM system. We propose novel micromachined tunable waveguide devices based on a hollow optical waveguide. The integration of hollow waveguides and MEMS elements gives us a large change in effective refractive index. As one of its applications to photonic integrated circuits, a variable optical attenuator is proposed and demonstrated. In addition, the tunability of the propagation constant in a hollow waveguide is also presented numerically and experimentally.

机译：可调光学设备是高速大容量DWDM系统的关键设备。我们提出了一种基于中空光波导的新型微机械可调波导器件。中空波导和MEMS元件的集成使我们的有效折射率有了很大的变化。作为其在光子集成电路上的应用之一，提出并展示了一种可变光衰减器。此外，还通过数值和实验的方法介绍了中空波导中传播常数的可调性。

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《電子情報通信学会技術研究報告. レ-ザ·量子エレクトロニクス. Lasers and Quantum Electronics》 |2002年第588期|共6页
作者
Toru Miura; Hisatomo Tanaka; Takahiro Sakaguchi; Fumio Koyama;
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原文格式 PDF
正文语种 jpn
中图分类基础理论;
关键词
Hollow waveguide; Photonic functional device; MEMS; Effective refractive index; Variable optical attenuator;

机译：空心波导;光子功能器件;MEMS;有效折射率;可变光衰减器;

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1. Fabrication of hollow waveguide and it's application to photonic integrated circuits - toward photonic integrated circuits based on hollow waveguide and MEMS [J] . Toru Miura, Hisatomo Tanaka, Takahiro Sakaguchi, 電子情報通信学会技術研究報告. フォトニックネットヮ-ク. Photonic Network . 2002,第582期

机译：空心波导的制造及其在光子集成电路中的应用-基于空心波导和MEMS的光子集成电路
2. Fabrication of hollow waveguide and it's application to photonic integrated circuits - toward photonic integrated circuits based on hollow waveguide and MEMS [J] . Toru Miura, Hisatomo Tanaka, Takahiro Sakaguchi, 電子情報通信学会技術研究報告. レ-ザ·量子エレクトロニクス. Lasers and Quantum Electronics . 2002,第588期

机译：空心波导的制造及其在光子集成电路中的应用-基于空心波导和MEMS的光子集成电路
3. Fabrication of hollow waveguide and it's application to photonic integrated circuits - toward photonic integrated circuits based on hollow waveguide and MEMS [J] . Toru Miura, Hisatomo Tanaka, Takahiro Sakaguchi, 電子情報通信学会技術研究報告. 光エレクトロニクス. Optoelectronics . 2002,第586期

机译：空心波导的制造及其在光子集成电路中的应用-基于空心波导和MEMS的光子集成电路
4. Design, fabrication and characterization of integrated antiresonant hollow core waveguides for photonics integrated circuits [C] . Bernini R., De Nuccio E., Mottola F., Fibres and Optical Passive Components, 2005. Proceedings of 2005 IEEE/LEOS Workshop on . 2005

机译：用于光子集成电路的集成反谐振空心波导的设计，制造和表征
5. Ultra-Low Loss Waveguides with Application to Photonic Integrated Circuits. [D] . Bauters, Jared F. 2013

机译：超低损耗波导及其在光子集成电路中的应用。
6. Geometrical tuning art for entirely subwavelength grating waveguide based integrated photonics circuits [O] . Zheng Wang, Xiaochuan Xu, Donglei Fan, -1

机译：基于完全亚波长光栅波导的集成光子电路的几何调谐技术
7. Towards photonic integrated circuits : design and fabrication of passive InP waveguide bends [O] . Rodriguez Sarah J. (Sarah Janelle) 1979- 2004

机译：走向光子集成电路：无源Inp波导弯曲的设计和制造

Fabrication of hollow waveguide and it's application to photonic integrated circuits - toward photonic integrated circuits based on hollow waveguide and MEMS

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