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Synthesis and characterisation of chemical bath deposited TiO_2 thin-films

机译：化学浴沉积TiO_2薄膜的合成与表征

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A series of titania thin films was prepared by chemical bath deposition (CBD) of TiCl_3 on indium tin oxside (ITO) glass at room temperature, followed by calcinations at 500 °C for 4 h. The effect of cyclic deposition on phase composition, microstructure and electrical resistivity of TiO_2 thin films was characterised using X-ray diffraction, scanning electron microscopy and four-point probe respectively. Results showed that TiO_2 films produced by single deposition cycle were amorphous. In contrast, those produced by 5 and 6 deposition cycles were partly amorphous and partly crystalline with the formation of rutile. Both the film thickness and electrical resistivity increased with an increase in the number of deposition cycles.
机译：通过在室温下在铟锡黄土（ITO）玻璃上化学浴沉积（TiCl_3）TiCl_3，然后在500°C下煅烧4 h，来制备一系列二氧化钛薄膜。分别用X射线衍射，扫描电镜和四点探针表征了循环沉积对TiO_2薄膜相组成，微观结构和电阻率的影响。结果表明，单次沉积制备的TiO_2薄膜为非晶态。相反，由5和6个沉积循环产生的那些部分是非晶态的，部分是结晶的，形成金红石型。膜厚度和电阻率均随着沉积循环数的增加而增加。

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