Phase-shifting interferometry is a preferred technique for high-precision surface form measurements, but the difficulty in handling the intensity distortions from multiple-surface interference has limited the general use of the technique to interferometer cavities producing strict two-beam interference. I show how the capabilities of phase-shifting interferometry can be extended to address this problem using wavelength tuning techniques. The basic theory behind the technique is reviewed and applied specifically to the measurement of parallel plates, where surfaces, optical and physical thickness, and homogeneity are simultaneously obtained. Basic system requirements are derived, common error sources are discussed, and the results of the measurements are compared with theory and alternative measurement methods. (C) 2003 Optical Society of America. [References: 18]
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