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Interferometric ellipsometer with wavelength-modulated laser diode source

机译:具有波长调制激光二极管源的干涉椭圆仪

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摘要

An interferometric ellipsometer, with no moving parts and an inexpensive laser diode source, is demonstrated. Temporal fringes are produced by a small modulation of the laser diode bias current and unbalanced arms in the interferometer. Fringe analysis algorithms are developed, and accurate measurements of the optical properties of a number of samples are made. Temperature tuning the laser diode center wavelength allows the frequency dependence of the optical properties to be determined over a wavelength range of approximately 1 nm.
机译:演示了一种没有运动部件和便宜的激光二极管源的椭圆偏振干涉仪。通过对激光二极管偏置电流的较小调制以及干涉仪中的不平衡臂会产生时间条纹。开发了边缘分析算法,并对许多样品的光学性质进行了准确的测量。对激光二极管中心波长进行温度调节可以在大约1 nm的波长范围内确定光学特性的频率依赖性。

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