Model-independent method for the determination of guiding thin-film optical parameters

Ildar Salakhutdinov; Yuriy Danylyuk; Kalyani Chaganti; Ivan Avrutsky; Gregory Auner

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Model-independent method for the determination of guiding thin-film optical parameters

机译：确定薄膜光学参数的模型无关方法

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摘要

A method for the determination of the optical constants of thin films based on the combination of a waveguide measurement procedure with the spectroscopic measurements made from the UV to the IR is presented. As a test material AlN thin film on sapphire substrates is investigated.

机译：提出了一种基于波导测量程序与从UV到IR的光谱测量相结合的薄膜光学常数测定方法。作为测试材料，研究了蓝宝石衬底上的AlN薄膜。

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《Applied optics》 |2006年第23期|共6页
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Ildar Salakhutdinov; Yuriy Danylyuk; Kalyani Chaganti; Ivan Avrutsky; Gregory Auner;
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1. Model-independent method for the determination of guiding thin-film optical parameters [J] . Ildar Salakhutdinov, Yuriy Danylyuk, Kalyani Chaganti, Applied Optics . 2006,第23期

机译：确定薄膜光学参数的模型无关方法
2. Model-independent method for the determination of guiding thin-film optical parameters [J] . Ildar Salakhutdinov, Yuriy Danylyuk, Kalyani Chaganti, Applied optics . 2006,第23期

机译：确定薄膜光学参数的模型无关方法
3. Determination of structural parameters characterizing thin films by optical methods: A comparison between scanning angle reflectometry and optical waveguide lightmode spectroscopy [J] . C. Picart, G. Ladam, B. Senger, The Journal of Chemical Physics . 2001,第2期

机译：用光学方法确定表征薄膜的结构参数：扫描角反射法和光波导光模光谱法的比较
4. Semiconductor thin-film optical constant determination and thin-film thickness measurement equipment correlation [C] . Anne M. Kaiser, Digital Equipment Corp., Marlborough, Integrated Circuit Metrology, Inspection, and Process Control V . 1991

机译：半导体薄膜光学常数测定与薄膜厚度测量设备的相关性
5. Determination of carbon nanotube thin film thickness and optical parameters by a new modified prism waveguide coupler system [D] . Baltas, Georgios 2013

机译：新型改进的棱镜波导耦合器系统测定碳纳米管薄膜的厚度和光学参数
6. Special Section on Optical Diagnostic and Biophotonic Methods from Bench to Bedside: Real-time three-dimensional Fourier-domain optical coherence tomography video image guided microsurgeries [O] . Jin U. Kang, Yong Huang, Kang Zhang, 2012

机译：从工作台到床头的光学诊断和生物光子方法特别部分：实时三维傅里叶域光学相干断层扫描视频图像引导显微外科手术
7. Optical Second-Harmonic Generation By Guided-Radiation Mode Coupling in a Thin-Film Optical-Waveguide [O] . Hano Kazunori, Takagi Keiji 1980

机译：薄膜光波导中的引导辐射模式耦合产生的二次谐波光
8. Model-Independent Determination of Resonance Parameters for Reactions Involving Only Zero Spin Particles [R] . Basrak, Z., Auger, F., Charles, P., 1985

机译：仅涉及零自旋颗粒的反应的共振参数的模型无关的确定

Model-independent method for the determination of guiding thin-film optical parameters

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