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首页> 外文期刊>Applied optics >Iterative full-bandwidth wavefront reconstruction from a set of low-tilt Fizeau interferograms for high-numerical-aperture surface characterization
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Iterative full-bandwidth wavefront reconstruction from a set of low-tilt Fizeau interferograms for high-numerical-aperture surface characterization

机译：从一组低倾斜Fizeau干涉图进行迭代的全带宽波阵面重构，以实现高数值孔径表面表征

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摘要

Full-bandwidth phase-shifting methods as well as band-limited fringe carrier techniques are both problematic when testing high-NA spherical surfaces in Fizeau interferometers. Phase stepping is usually performed by moving a sample and reference sphere relative to each other along the optical axis. At a high NA the method suffers from phase-shift inhomogeneity across the sample surface. Fringe carrier techniques rely on a minimum fringe frequency and call for an off-axis position of the sample, which in turn introduces condenser aberrations. Distortion of the imaging optics generates further apparent aberrations. We propose to combine both principles. The phase shifts are replaced by a set of very low tilts such that the sample is virtually on axis. Initial wavefront estimates are generated by a fringe carrier method. An adaptive Misell-type algorithm combines the interferometric data and iteratively improves the reconstructed wavefront until full spatial bandwidth is achieved.
机译：在Fizeau干涉仪中测试高NA球形表面时，全带宽相移方法以及带宽受限的条纹载波技术都存在问题。相位步进通常是通过使样品和参考球沿光轴相对移动来执行的。在高NA时，该方法会在整个样品表面遭受相移不均匀性的困扰。条纹载体技术依赖于最小条纹频率，并要求样品的离轴位置，这又引入了聚光器像差。成像光学器件的变形会产生进一步的明显像差。我们建议结合这两个原则。相移由一组非常低的倾斜度代替，因此样品实际上在轴上。初始波前估计是通过条纹载波法生成的。自适应Misell型算法结合了干涉测量数据，并迭代地改善了重建的波前，直到获得完整的空间带宽为止。

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