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首页> 外文期刊>Applied optics >Surface assessment of CaF_(2) deep-ultraviolet and vacuum-ultraviolet optical components by the quasi-Brewster angle technique
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Surface assessment of CaF_(2) deep-ultraviolet and vacuum-ultraviolet optical components by the quasi-Brewster angle technique

机译：CaF_（2）深紫外和真空紫外光学元件的表面准拟布鲁斯特角技术评估

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摘要

The requirements for optical components have drastically increased for the deep-ultraviolet and vacuum-ultraviolet spectral regions. Low optical loss, high laser damage threshold, and long lifetime fluoride optics are required for microlithographic applications. A nondestructive quasi-Brewster angle technique (qBAT) has been developed for evaluating the quality of optical surfaces including both top surface and subsurface information. By using effective medium approximation, the negative quasi-Brewster angle shift at wavelengths longer than 200 nm has been used to model the distribution of subsurface damage, whereas the positive quasi-Brewster angle shift for wavelengths shorter than 200 nm has been explained by subsurface contamination. The top surface roughness depicted by the qBAT is consistent with atomic force microscopy measurements. The depth and the microporous structure of the subsurface damage measured by the qBAT has been confirmed by magnetorheological finishing. The technique has been extended to evaluate both polished and antireflection-coated CaF_(2) components.
机译：对于深紫外和真空紫外光谱区域，对光学组件的要求已大大增加。微光刻应用需要低光损耗，高激光损伤阈值和长寿命的氟化物光学器件。已经开发了一种非破坏性准布鲁斯特角技术（qBAT），用于评估光学表面的质量，包括顶面和次表面信息。通过使用有效的介质近似，波长大于200 nm的负准布鲁斯特角偏移已被用于对次表面损伤的分布进行建模，而波长小于200 nm的正准布鲁斯特角偏移已被表面污染所解释。 。 qBAT描绘的顶表面粗糙度与原子力显微镜测量结果一致。 qBAT测得的地下破坏的深度和微孔结构已通过磁流变精加工得到证实。该技术已扩展到评估抛光和抗反射涂层的CaF_（2）组件。

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