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Accuracy and resolution of a dynamic-speckle profilometer

机译:动态散斑轮廓仪的精度和分辨率

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摘要

We propose and demonstrate a new technique for fast noncontact and continuous profile measurement of a rough surface. The technique is based on frequency tracking of the power modulation of spatially filtered scattered light. A dynamic speckle pattern is created when the laser beam scans the surface under study. The main advantage of the proposed technique is high scanning speed, which provides an extremely short response time of the distance sensor (<0.1 (mu)s). Parameters that affect accuracy and resolution of the system are analyzed. Possible ways for further improvement of the measurements accuracy are discussed.
机译:我们提出并演示了一种用于粗糙表面的快速非接触和连续轮廓测量的新技术。该技术基于对空间滤波后的散射光的功率调制的频率跟踪。当激光束扫描被研究的表面时,会产生动态斑点图案。所提出的技术的主要优点是高扫描速度,这提供了距离传感器的极短响应时间(<0.1μs)。分析影响系统精度和分辨率的参数。讨论了进一步提高测量精度的可能方法。

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