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Analysis of a spatially dispersive displacement sensor utilizing an AlGaInP chip

机译:使用AlGaInP芯片的空间色散位移传感器的分析

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We present a demonstration and analysis of an industrialized design of a spatially dispersive displacementsensor, which is composed of an AlGaInP gain chip in visible range, optical assembly, and a spectrum analyzer. The sensor utilizes the spatial dispersion of focus from the optical assembly and wavelength spectrum's deviation induced by the displacement of the target. As a result, the sensor delivers a quick and simple way of measuring displacement. By adapting the magnification and resolution of the optical assembly, a displacement sensor with a middle measurement range, approx10 (mu)m, was obtained. However, we should note that 25 nm resolution is limited by the bandwidth and temperature fluctuation of the gain chip.
机译:我们对空间色散位移传感器的工业化设计进行了演示和分析,该传感器由可见范围内的AlGaInP增益芯片,光学组件和光谱分析仪组成。传感器利用了光学组件的聚焦空间分散以及目标物位移引起的波长光谱偏差。结果,该传感器提供了一种快速而简单的位移测量方法。通过适应光学组件的放大率和分辨率,获得了中等测量范围约为10μm的位移传感器。但是,我们应注意,25 nm分辨率受增益芯片的带宽和温度波动的限制。

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