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Multiple-wavelength digital holographic interferometry using tunable laser diodes

机译:使用可调激光二极管的多波长数字全息干涉仪

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Here we present multiple-wavelength digital holographic interferometry with a wide measurement range using laser diodes. Small wavelength differences can be easily realized by the wavelength tuning of laser diodes with injection current controls. A contour map of an object with a wide measurement range and a high sensitivity is demonstrated by combining a few contour maps with several measurement sensitivities. Synthetic wavelengths are calibrated using a known height difference. This alleviates the need to have high precise knowledge of the recording wavelengths. The synthetic wavelengths ranged from similar to 3 mm for high measurement sensitivity to similar to 4 cm for wide measurement range. An rms error of similar to 35 mu m for a similar to 1 cm height measurement is shown. The measured profile of holographic interferometry agrees with a standard stylus instrument. (C) 2008 Optical Society of America.
机译:在这里,我们介绍了使用激光二极管具有较宽测量范围的多波长数字全息干涉仪。通过使用注入电流控制的激光二极管的波长调谐,可以轻松实现较小的波长差。通过将几个轮廓图与多个测量灵敏度结合起来,可以显示出具有宽测量范围和高灵敏度的物体轮廓图。使用已知的高度差来校准合成波长。这减轻了对记录波长的高精度知识的需求。对于高测量灵敏度,合成波长的范围从约3 mm到宽测量范围,约4 cm。显示了类似于1厘米高度测量的rms误差,约为35微米。全息干涉仪的测量轮廓与标准测针仪一致。 (C)2008年美国眼镜学会。

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