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In situ monitoring of surface postprocessing in large-aperture fused silica optics with optical coherence tomography

机译:大口径熔融石英光学系统中表面后处理的光学相干层析成像原位监测

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摘要

Optical coherence tomography (OCT) is explored as a method to image laser-damage sites located on the surface of large aperture fused silica optics during postprocessing via CO_(2) laser ablation. The signal analysis for image acquisition was adapted to meet the sensitivity requirements for this application. A long-working-distance geometry was employed to allow imaging through the opposite surface of the 5 cm thick optic. The experimental results demonstrate the potential of OCT for remote monitoring of transparent material processing applications.
机译:光学相干断层扫描(OCT)是一种通过CO_(2)激光烧蚀在后处理过程中对位于大口径熔融石英光学元件表面的激光损伤部位成像的方法。图像采集的信号分析经过调整,可以满足该应用的灵敏度要求。采用长工作距离的几何形状,以允许通过5厘米厚的光学元件的相对表面成像。实验结果证明了OCT在透明材料加工应用的远程监控中的潜力。

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